Diffusion furnace body with uniform heating function

Abstract

The invention discloses a diffusion furnace body with a uniform heating function and relates to the field of chip processing. The problem of low temperature uniformity of existing 12-inch diffusion furnace bodies is solved. The diffusion furnace body is characterized by comprising a furnace body outer wall, a thermal insulation layer, resistor strips disposed on the thermal insulation layer and aplurality of fixing plates disposed on the thermal insulation layer; the distance between every two adjacent circles of resistor strips on the portion, close to the one-third front end of the furnacebody, of the thermal insulation layer is 3-25 mm, the distance between every two adjacent circles of resistor strips at the one-third middle end of the furnace body is 4-30 mm, and the distance between every two adjacent circles of resistor strips on the portion of the one-third rear end of the furnace body is 3-5 mm; a cavity is reserved between the outer wall of the furnace body and the thermalinsulation layer, air inlet pipes are fixedly connected to the outer wall of the furnace body, and air inlet holes are formed in the inner wall of the thermal insulation layer. By controlling the distance between the resistor strips in the furnace body and utilizing air to transfer high temperature near the inner wall of the thermal insulation layer to the middle of the furnace body, the uniformity of the temperature of all parts of the interior of the furnace body is improved.

Description

technical field [0001] The invention relates to the field of chip processing, more specifically, it relates to a uniformly heated diffusion furnace body. Background technique [0002] Diffusion furnace is an indispensable production equipment for chip production. With the development of the current chip industry, large-size diffusion furnaces are necessary products. Now most of the domestic diffusion furnaces are 4-inch and 6-inch, and 12-inch diffusion furnaces are relatively 6-inch For the diffusion furnace, the space in the furnace body increases, and the temperature control in the furnace body is more difficult, which makes the temperature uniformity in the furnace body lower. Once the temperature uniformity in the furnace body is lower, the chip resistivity at the production site is prone to occur. Inconsistent issues. A kind of 8-inch diffusion furnace with high temperature uniformity everywhere in the furnace body is urgently needed now. Contents of the invention ...

AI Technical Summary

Problems solved by technology

[0002] Diffusion furnace is an indispensable production equipment for chip production. With the development of the current chip industry, large-size diffusion furnaces are necessary products. Now most of the domestic diffusion furnaces are 4-inch and 6-inch, and 12-inch diffusion furnaces are relatively 6-inch For the diffusion furnace, the space in the furnace body increases, and the temperature control in the furnace body is more difficult, which makes the temperature uniformity in the furnace body lower. Once the temperature uniformity in the furnace body is lower, the chip resistivity at the production site is prone to occur. inconsistencies

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