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Movable lens adjusting mechanism

A technology of lens adjustment and driving mechanism, applied in opto-mechanical equipment, installation, optics, etc., can solve the problems of large radial space, inapplicability, occupied by flexible hinge structure, etc., and achieve the effect of small radial size and simple structure

Active Publication Date: 2018-12-11
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] Chinese application publication CN102707404A discloses a three-degree-of-freedom micro-adjustment mechanism for lithography projection objective lens, in which the movable lens is supported by three uniformly distributed flexible hinges, and the movement is realized through the combined movement of the three flexible hinges The lens moves in the X / Y direction, however, because the flexible hinge structure takes up a large radial space, it is not suitable for occasions with compact radial structures

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Embodiment Construction

[0034] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar extensions without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0035] In the following, specific embodiments of the present invention will be described in conjunction with the accompanying drawings. see Figure 1-7 As shown, the present invention provides a movable mirror adjustment mechanism, which can realize the adjustment of three degrees of freedom of the movable mirror group 200 .

[0036] figure 1 and 2 The overall structure diagram and the cross-sectional diagram of the movable mirror adjustment mechanism according to the embodiment of the present invention are respectively sho...

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Abstract

The invention provides a movable lens adjusting mechanism which comprises a movable lens assembly including an optical lens and a lens seat for fixing the optical lens; a driving mechanism assembly arranged below the movable lens assembly and used for adjusting the position of the movable lens assembly; and a supporting seat, where the driving mechanism assembly is installed. Three degrees of freedom adjustment of the movable lens assembly is realized through the movement of the driving mechanism assembly. The movable lens adjusting mechanism is simple in structure and small in radial size.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a movable mirror adjustment mechanism. Background technique [0002] In the lithography projection objective lens, due to the manufacturing and assembly errors of the lens, the imaging quality of the objective lens deteriorates. In order to solve this problem, movable lenses are generally used to compensate for the manufacturing and assembly errors of the lens. [0003] Chinese application publication CN102707404A discloses a three-degree-of-freedom micro-adjustment mechanism for lithography projection objective lens, in which the movable lens is supported by three uniformly distributed flexible hinges, and the movement is realized through the combined movement of the three flexible hinges The lens moves in the X / Y direction. However, since the flexible hinge structure occupies a large radial space, it is not suitable for occasions with a compact radial s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/00G03F7/20
CPCG02B7/00G03F7/70141
Inventor 彭云平
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD