Method for calibrating optical scanner and device thereof
A technology for optical scanners and scanning angles, applied in the direction of using optical devices, optics, optical components, etc., can solve the problems of unfeasible feedback methods, increase the size or volume of optical scanners, etc., and achieve the effect of reducing measurement errors
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[0028] refer to figure 1 , shows an example optical scanning system 10 with an example calibration management device 64 . Calibration management apparatus 64 in this example is coupled to optical scanner arrangement 54, which includes a source arm and an imaging arm, both of which can contribute to scanner errors that can be mitigated by the techniques of the present invention. In this example, calibration management device 64 passes through image digitizer 56, digital-to-analog (D / A) converters 60, 66X, and 66Y, light source driver 62, MEMS (microelectromechanical system) X-channel driver 68X, and MEMS Y-channel driver 68Y and Z translation stages 70 are coupled to the optical scanner device 54, although the exemplary optical scanning system 10 may include other types and numbers of devices and components in other configurations. This technique offers several advantages, including a method that facilitates more efficient calibration of three-dimensional optical scanner devic...
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