Substrate conveyor

Abstract

Disclosed is a substrate transporting apparatus, comprising a base (10), a carrier (12), a transfer mechanism (14) and a positioning mechanism (16), wherein the carrier (12) is movably arranged on the base (10) and is used for carrying a substrate (20); the carrier (12) has a first side (121) and a second side (122) opposite the first side (121); the transfer mechanism (14) abuts against the carrier (12) and is used for transferring the carrier (12) into and out of the base (10); the positioning mechanism (16) comprises at least one blocking element (160) and at least one lifting element (162); the blocking element (160) is arranged on the base (10) and is close to the first side (121) of the carrier (12); the lifting element (162) is arranged on the base (10) and is close to the second side (122) of the carrier (12), and is used for moving the carrier (12) to abut against the blocking element (160) and for moving the carrier (12) to abut against the transfer mechanism (14).

Description

technical field [0001] The invention relates to the field of substrate conveying, in particular to a substrate conveying device. Background technique [0002] At present, the preparation of electronic products such as liquid crystal display panels, semiconductor elements, or solar cells requires multiple processes for various substrates, such as etching, sputtering, and cleaning processes. These processes may be performed by a single process machine. implement. Since multiple processes must be performed, substrates must be picked and placed, and then transported from one process tool to the next. The substrate carrier (Carrier) on the process machine is likely to wear or deform its own mechanism due to long-term use, so that its position on the process machine deviates from the originally set position. When picking and placing a substrate, especially a glass substrate, it may be broken due to the deviation of the position of the substrate carrier. This problem not only aff...

AI Technical Summary

Problems solved by technology

The substrate carrier (Carrier) on the process machine is easy to wear or deform its own mechanism due to long-term use, so that its position on the process machine deviates from the originally set position

When picking and placing substrates, especially glass substrates, it may be broken due to the deviation of the position of the substrate carrier. This problem not only affects the production capacity, but also increases the manufacturing cost.

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