Magnetic analyzer unit

A magnetic analyzer and magnetic field technology, applied in electrical components, discharge tubes, circuits, etc., can solve problems affecting the electrical properties of doped semiconductor materials and reducing the ion purity of semiconductor materials

Inactive Publication Date: 2019-02-01

HUAIAN IMAGING DEVICE MFGR CORP

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AI-Extracted Technical Summary

Problems solved by technology

However, existing magnetic analyzer cell designs are limited in blocking unwanted impurity particles, which may reduce the purity of the ...

Method used

[0034] FIG. 3A shows a magnetic analyzer unit 340 according to some embodiments of the present disclosure. The magnetic analyzer unit 340 includes an ion channel 341 , a receiving end opening 342 and an output end opening 343 . The receiving end opening 342 may be configured to receive ion flow from the outside. For example, receiving end opening 342 may be coupled to an ion source (eg, an ion source as described below with respect to FIG. 4 ) to receive a flow of ions at a velocity from the ion source. The output port opening 343 may be configured to output the ions screened by the magnetic analyzer unit 340 to the outside. For example, the output port opening 343 may be coupled to a beamline unit (eg, as described below with reference to FIG. 4 ) to output ions having a specific mass-to-charge ratio in the ion flow to the beamline unit. The ion channel 341 is a hollow channel connecting the receiving-end opening 342 and the output-end opening 343 , which is configured to include one or more U-shaped channel segments to improve the ability to filter out unwanted impurity particles.

[0051] According to some embodiments o...

Abstract

The present invention relates to a magnetic analyzer unit. The magnetic analyzer unit comprises a receiving end opening, an output end opening and an ion channel; the receiving end opening is configured to receive ion current from an ion source; the output end opening is configured to output ions having a specific mass-to-charge ratio in the ion current; the ion channel is connected with the receiving end opening to the output end opening; and the ion channel comprises at least one U-shaped channel section, wherein the at least one U-shaped channel section is disposed in a magnetic field, wherein the magnetic field is configured to enable the ions having the specific mass-to-charge ratio to pass through the at least one U-shaped channel section.

Application Domain

Electric discharge tubes

Technology Topic

PhysicsSpecific mass +3

Image

Examples

Experimental program(18)

Example

[0072] Example 1. A magnetic analyzer unit comprising:

[0073] a receiving end opening configured to receive the flow of ions from the ion source;

[0074] an output opening configured to output ions having a particular mass-to-charge ratio in the ion stream;

[0075] an ion channel connecting the receiving end opening and the output end opening, and the ion channel includes at least one U-shaped channel segment;

[0076] Wherein, the at least one U-shaped channel section is arranged in a magnetic field configured to enable the ions having a specific mass-to-charge ratio to pass through the at least one U-shaped channel section.

Example

[0077] Example 2. The magnetic analyzer unit of example 1, wherein:

[0078] The magnetic field includes at least a first magnetic field configured to cause the ions having a specific mass-to-charge ratio to rotate in a first rotation direction, and a second magnetic field configured to have a specific mass-to-charge ratio. The charged ions are rotated in a second direction of rotation, the second direction of rotation being different from the first direction of rotation.

Example

[0079] Example 3. The magnetic analyzer unit of example 2, wherein:

[0080] The at least one U-shaped channel section comprises a cascaded plurality of U-shaped channel sections.

PUM

Description & Claims & Application Information

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