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Piezoelectric substrate and surface acoustic wave device

A piezoelectric substrate, substrate technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, fabrication/assembly of piezoelectric/electrostrictive devices, material selection for piezoelectric devices or electrostrictive devices, etc. direction, can solve the problems of substrate edge defect, chipping, lower productivity, electrode short circuit, etc.

Active Publication Date: 2019-03-15
KYOCERA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that, in the process of producing a substrate (wafer) from these single crystals, chipping and chipping tend to occur on the surface of the substrate and the edge of the substrate due to electrostatic discharge (spark), and the productivity decreases.
In addition, the formed electrodes may be short-circuited due to static electricity

Method used

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  • Piezoelectric substrate and surface acoustic wave device
  • Piezoelectric substrate and surface acoustic wave device
  • Piezoelectric substrate and surface acoustic wave device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Using the raw materials of lithium carbonate and tantalum pentoxide (Japanese: raw materials), LT single crystal rods with a diameter of about 100 mm were grown by the Czochralski method. The obtained LT single crystal rod was subjected to peripheral grinding, slicing, and grinding to obtain a substrate with a thickness of 200 μm. The resulting substrate was mixed with KHCO 3 Together, heat treatment was performed at 550° C. for 2 hours under a nitrogen atmosphere to obtain an LT substrate.

Embodiment 2

[0043] In order to examine the allowable degree of variation in characteristic values, an LT substrate was obtained in the same manner as in Example 1.

Embodiment 3

[0045] An LT substrate was obtained in the same manner as in Example 1 except that the processing temperature was set at 580°C.

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Abstract

Provided is a piezoelectric substrate which comprises lithium-containing metal compound crystals such as lithium tantalate (LT) crystals, the piezoelectric substrate containing potassium therein, andhaving a substantially homogeneous potassium distribution in the thickness direction thereof. Also, provided is a piezoelectric substrate, in which in the Raman spectrum as measured from the cross-sectional direction, a peak attributed to Li-O lattice vibration existing in the vicinity of 380 cm <-1> is shifted to a higher wavenumber side, compared to the same peak of an untreated piezoelectric substrate having a conductivity of 1*10-15 S / cm or less.

Description

technical field [0001] The present invention relates to a piezoelectric substrate including lithium-containing metal compound crystals used in applications such as SAW devices for signal processing using surface acoustic waves (Surface Acountic Wave: SAW), and SAW devices using the piezoelectric substrates. Background technique [0002] A piezoelectric substrate including a lithium-containing metal compound crystal is widely used as a SAW device for signal processing using the electrical characteristics of SAW. As lithium-containing metal compound crystals, for example, lithium tantalate LiTaO 3 (hereinafter referred to as LT) crystals. In addition, regarding lithium-containing metal compound crystals, lithium niobate LiNbO can also be used 3 crystals. The SAW device has, for example, a structure in which an electrode composed of a metal pattern formed by photolithography is provided on a substrate of a piezoelectric substrate composed of an LT crystal. [0003] For exam...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/30C01G35/00C30B31/06H01L41/18H01L41/22H03H9/25
CPCC01G35/00C30B29/30C30B31/06H03H9/02559H03H9/02921H03H9/25H10N30/10513H10N30/8542H10N30/01H10N30/85
Inventor 岩下修三井上真司山路浩之近藤久雄
Owner KYOCERA CORP
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