Light-control flexible semiconductor terahertz wave space modulator

A space modulator and optical control flexible technology, applied in the field of optoelectronic technology, can solve the problems of affecting the modulation resolution and the easy diffusion of photogenerated carriers to the surroundings, and achieve the effects of clear imaging, improved clarity, and reduced transmittance

Inactive Publication Date: 2019-03-19
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

However, the photogenerated carriers generated by such modulators are easy to diffuse

Method used

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  • Light-control flexible semiconductor terahertz wave space modulator
  • Light-control flexible semiconductor terahertz wave space modulator
  • Light-control flexible semiconductor terahertz wave space modulator

Examples

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[0020] In the present invention, the silicon chip is made into a small array and placed on a flexible insulating substrate (PDMS) to prevent the diffusion of carriers between pixels, realize the flexibility of the device, and also improve the resolution of the semiconductor terahertz wave spatial modulator. rate.

[0021] The invention also provides a method for terahertz modulation based on the PDMS (polydimethylsiloxane) substrate attached to the silicon array. This technology will affect the subsequent development of flexible terahertz devices and miniaturized terahertz devices, such as terahertz-based spatial light modulators, terahertz imaging and communication technologies.

[0022] The semiconductor material (such as silicon wafer) of the present invention is cut into a smaller square size (0.1mm ~ 5mm), and the arrayed small semiconductor is attached to a flexible substrate (such as PDMS) to make a flexible semiconductor. Each small semiconductor represents a pixel of the ...

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Abstract

The invention provides a light-control flexible semiconductor terahertz wave space modulator, and relates to a photoelectric technology, a terahertz modulation technology and an imaging technology. The light-control flexible semiconductor terahertz wave space modulator comprises a flexible substrate and semiconductor chips arranged on the surface of the flexible substrate in an array mode, and thediameter of the minimum circumscribed circle of the bottom face of each semiconductor chip is 0.1-6mm. The light-control flexible semiconductor terahertz wave space modulator has the advantages thatthe terahertz time domain imaging definition can be significantly improved due to the fact that the carrier diffusion between the semiconductor chips is weakened, so that the terahertz wave transmissivity decreases; during frequency domain imaging, imaging of the part outside an absorption peak can be clearer.

Description

technical field [0001] The invention relates to photoelectric technology, terahertz modulation technology and imaging technology. Background technique [0002] Terahertz refers to radiation with a frequency of 0.1-10 THz on the electromagnetic spectrum, and a wavelength range of 0.03-3mm, which is between radio waves and light waves. The long-wave properties of terahertz are close to electronic science, while the short-wave properties of terahertz are close to photon science. In recent years, terahertz technology has developed rapidly. Researchers and scholars from various countries generally believe that THz science is an interdisciplinary subject of great strategic significance. Because THz not only has a wavelength more than 1000 times smaller than microwaves, but also has a short pulse time, THz waves have high spatial and temporal resolution. At the same time, unlike X-rays, terahertz waves will not cause harm to the human body. Therefore, THz waves have important ap...

Claims

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Application Information

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IPC IPC(8): G01J3/14G01J3/42G02F1/015
CPCG01J3/14G01J3/42G01J2003/2816G02F1/015
Inventor 文天龙张冲张怀武文岐业廖宇龙
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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