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A nanomanipulator

A nano-operation and control device technology, applied in the field of processing and manufacturing, can solve the problems of difficulty in realizing three-dimensional complex operations, low flexibility, and restrictions on the application of devices in new nano-devices, so as to save equipment costs, move with large strokes and high precision, reduce The effect of small travel distances

Active Publication Date: 2019-11-22
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing nano-manipulation devices have low flexibility, it is difficult to realize three-dimensional complex operations, and it is difficult to combine with nano-connection technology, which limits the application of the device in the manufacture of new nano-devices

Method used

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  • A nanomanipulator
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] A nano-junction device, such as Figure 1 to Figure 3 As shown, it includes a vacuum cavity 101, a near-field light generating device, a nano-manipulation device and a control device 107, the near-field light generating device includes a vacuum cavity laser emitting device and an execution end, and the nano-manipulation device includes a sample stage and an execution end Operating device; the nano-manipulating device is arranged inside the vacuum chamber 101, the execution end is connected to the execution-end operating device, the near-field light generating device and the nano-manipulating device are respectively connected to the control device 107 connected; the sample stage is suitable for moving the sample, and the execution end operation device is suitable for driving the execution end to move.

[0049] Here, the sample is a silicon wafer with nanoparticles and nanowires dispersed on its surface. In actual operation, the sample stage is provided with a sample plac...

Embodiment 2

[0052] Like the embodiment described above, this embodiment differs from it in that, as Figure 1 to Figure 4 As shown, the near-field light generating device includes: a laser emitting device, a fiber coupler 303 and an execution end, the laser emitting device is suitable for generating a laser beam, and the fiber coupler 303 is connected to the execution end through an optical fiber 304, so The fiber coupler 303 is suitable for coupling the laser beam into the optical fiber 304; the execution end is suitable for generating near-field light by using the laser beam.

[0053] The advantage of this arrangement is that the spatially free laser beam is coupled into the optical fiber 304 through the optical fiber coupler 303 , and then the optical fiber 304 is used to connect to the execution end, and the laser beam is delivered to the execution end through the optical fiber 304 .

[0054] Such as Figure 1 to Figure 4 As shown, the laser emitting device and the fiber coupler 303 ...

Embodiment 3

[0058] Like the embodiment described above, this embodiment differs from it in that, as Figure 1 to Figure 4 As shown, the laser emitting device includes a laser 301 and a laser parameter amplifier 302, the laser 301 is suitable for emitting the laser beam, the laser beam is emitted through the laser 301, and then enters the laser parameter amplifier 302, so The laser parameter amplifier 302 is suitable for adjusting the wavelength of the laser beam. The advantage of such setting is that the wavelength of the laser beam can be controlled through the setting of the laser parameter amplifier 302 .

[0059] Optionally, as in image 3 with Figure 4 As shown, the laser emitting device also includes a reflector 313, the mirror surface 315 of the reflector 313 presents a set angle with the laser beam emitted by the laser 301, and the reflector 301 is suitable for the The laser beam emitted by the laser 301 is reflected to the laser parameter amplifier 302 . The advantage of thi...

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PUM

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Abstract

The invention provides a nano-operation device, and relates to the processing and manufacturing technical fields. The nano-operation device includes a first motion mechanism, a second motion mechanismand a control device. The first motion mechanism has multiple translational degrees of freedom and at least one rotational degree of freedom. The second motion mechanism has multiple rotational degrees of freedom and at least one translational degree of freedom. The first motion mechanism and the second motion mechanism are each equipped with an actuating end. The first motion mechanism and the second motion mechanism are both connected with the control device; the control device adapts to control the first motion mechanism and the second motion mechanism to drive the motion of the actuatingends. The actuating ends are arranged on the first motion mechanism and the second motion mechanism, micro tweezers are formed with cooperative use of a plurality of the actuating ends, and nanowiresor nanoparticles are clamped.

Description

technical field [0001] The invention relates to the technical field of processing and manufacturing, in particular to a nanometer operation device. Background technique [0002] Nano-manipulation technology uses probes, electron beams, light, etc. to peel, pick up, move, place, and controllably deform nano-materials. Its operation and positioning accuracy can reach the nanometer level, and then realize the processing and assembly of nano-materials. The key to the structural assembly of a new generation of nanostructures. Nano-connection technology is based on chemical deposition, high-energy beam irradiation, ultrasonic and other technical means to realize the connection between nano-materials, between nano-materials and electrodes, which is conducive to the manufacture of new functional devices, which determines the realization of nanostructures. success or failure. Existing nano-manipulation devices have low flexibility, are difficult to realize three-dimensional complex...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/0004B82Y40/00
Inventor 杨立军王根旺王扬侯超剑龙昊天丁烨赵春洋
Owner HARBIN INST OF TECH