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Method for recycling silicon carbide in grinding waste slurry

A technology of silicon carbide and recovery method, applied in the direction of silicon carbide, carbide, etc., can solve problems such as unfavorable environmental protection, and achieve the effect of low cost, good economic value, and high purity

Inactive Publication Date: 2019-04-02
SAE TECH DELEVOPMENT DONGGUAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, high treatment costs are still required, and if the waste oil sludge is treated by incineration, a large amount of carbon dioxide will be generated, which is not conducive to environmental protection

Method used

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  • Method for recycling silicon carbide in grinding waste slurry

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Embodiment Construction

[0017] The cleaning method of the stainless steel workpiece of the present invention will be further described below in conjunction with the examples, but the present invention is not limited thereto.

[0018] Such as figure 1 As shown, an embodiment of the recovery method of silicon carbide in the grinding waste slurry of the present invention comprises the following steps successively:

[0019] 101. Diluting step: adding water to dilute the waste grinding slurry;

[0020] 102. Separation step: separating solids and liquids in the grinding waste paddle, the solids include silicon powder particles and silicon carbide particles;

[0021] 103. The removing step: removing silicon powder particles and liquid, and keeping silicon carbide particles;

[0022] 104. Alkali washing step: adding the silicon carbide particles into an alkaline solution for soaking; and

[0023] 105. A pickling step: adding an acidic solution to remove the residual alkaline solution to obtain purified si...

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Abstract

The invention relates to a method for recycling silicon carbide in grinding waste slurry, and the method comprises the following steps: 1, diluting the grinding waste slurry by adding water; (2) separating a solid and a liquid in the grinding waste slurry, wherein the solid comprises silicon powder particles and silicon carbide particles; (3) removing the silicon powder particles and the liquid, and reserving the silicon carbide particles; (4) adding the silicon carbide particles into an alkaline solution for soaking; and (5) and adding an acidic solution to remove the residual alkaline solution to obtain the purified silicon carbide. According to the invention, the silicon carbide in the grinding waste slurry can be effectively recycled, so that the silicon carbide can be recycled, and the environmental pollution is prevented.

Description

technical field [0001] The invention relates to the treatment of waste grinding liquid, in particular to a method for recovering silicon carbide in waste grinding slurry. Background technique [0002] During the cutting and grinding process of silicon wafers, the used grinding liquid will entrain the silicon crushed debris, impurities and worn silicon carbide produced during cutting, and will be continuously discharged outside the cutting area, which will become the particle concentration and Slurry waste oil sludge with extremely high turbidity. In the past, manufacturers could only dispose of these waste oil sludge as waste, or incinerate with heavy oil and then bury the ash. However, high treatment costs are still required, and if the waste oil sludge is treated by incineration, a large amount of carbon dioxide will be generated, which is not conducive to environmental protection. [0003] Therefore, it is urgent to provide a method for recovering silicon carbide in the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B32/956
Inventor 肖宝军
Owner SAE TECH DELEVOPMENT DONGGUAN