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Multi-channel Fabry-Perot light filter and preparation method thereof

A filter and multi-channel technology, which is applied in the field of preparation of multi-channel Fabry-Perot filters, can solve the problems of reduced filter yield and membrane surface pollution, etc.

Inactive Publication Date: 2019-04-19
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

[0004] The object of the present invention is to aim at the above-mentioned defect of prior art, provide a kind of multi-channel Fabry-Perot optical filter and preparation method thereof, aim at solving the problem that the current combined etching and multiple mask combination method is easy Causes the reduction of the yield of the filter and the pollution of the membrane surface

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  • Multi-channel Fabry-Perot light filter and preparation method thereof
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  • Multi-channel Fabry-Perot light filter and preparation method thereof

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[0025] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0026] In order to make the description of the present disclosure more detailed and complete, the following provides an illustrative description of the implementation modes and specific examples of the present invention; but this is not the only form for implementing or using the specific embodiments of the present invention. The description covers features of various embodiments as well as method steps and their sequences for constructing and operating those embodiments. However, other embodiments can also be used to achieve the same or equivalent functions and step sequences.

[0027] ...

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Abstract

The invention provides a multi-channel Fabry-Perot light filter and a preparation method thereof. In the multi-channel Fabry-Perot light filter preparation process, multiple channels can be integratedthrough only one-time etching by means of a focusing ion beam etching method. Focusing ion beam etching is a mask-free etching method under computer control, and can be directly used for etching of Fabry-Perot cavity layers at different positions of a hyperspectral filter at different time, so that the lengths of cavities of the channels can be adjusted by utilizing a single etching process.

Description

technical field [0001] The invention relates to a preparation technology of an optical thin film, in particular to a preparation technology of a multi-channel Fabry-Perot filter. Background technique [0002] Hyperspectral imaging technology is widely used, and has important applications in meteorological surveying and mapping, geology, resource investigation, agriculture, forestry, marine and other environmental detection, as well as medical and scientific experiments. Hyperspectral imaging technology is moving towards more spectral channels and wider integration The development in the direction of smaller size and lighter weight requires the preparation of corresponding multi-channel narrow-band micro-integrated filters. At present, some multi-channel integrated filter preparation methods mainly use the method of combining the combination etching method and multiple masks. The method of the combination etching method is mainly based on the Fabry-Perot principle. Ion beam ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28
CPCG02B5/285
Inventor 杨海贵高劲松王笑夷李资政刘海王延超
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI