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A kind of preparation method of transparent conductive electrode

A technology of transparent conductive electrodes and conductive layers, which is applied in the manufacture of cables/conductors, conductive layers on insulating carriers, circuits, etc., can solve the problems of high preparation costs, complicated preparation processes, and cumbersome preparation processes, and achieve optical properties close to, Excellent optical performance and simple preparation method

Active Publication Date: 2020-09-25
NUOVO FILM SUZHOU CHINA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above methods will lead to a large difference in optical properties between the etching area and the non-etching area, and have the disadvantages of relatively polluting the environment, complicated preparation process, and high preparation cost.
[0004] The Chinese Invention Patent Conductive Film, Manufacturing Method of Conductive Film and Touch Screen with Application Publication No. CN103187118A provides a method for preparing conductive film. First, grooves are opened on the substrate by nano-imprinting method and filled with nano-metal particles. 1. The nano paste formed by nano metal wires is sintered to obtain a metal grid with a width of 5-10um and a thickness of 0.5-2um. At this time, the chemical activity of the nano-silver particles or wires has been transformed into a micron-scale material, which is similar to Silver block material, so its etching needs to be oxidized to silver oxide first, and then sulfurized in hydrogen sulfide gas; the oxidation is formed by soaking or coating in hydrogen peroxide or acid solution, which belongs to the liquid-solid reaction in the solution; Although the second step uses gas as a reactant to react with silver oxide in the metal grid to obtain a non-conductive metal compound, it does not use gas to directly react with nano-metals, nor does it use nano-materials with a larger surface area. The characteristics of high chemical activity and easy doping, and its preparation process is complicated, and the yield rate cannot be guaranteed
[0005] The Chinese invention patent with the authorized notification number CN 105788760B is a method for preparing a transparent conductive electrode. It provides a method for forming a patterned electrode through a gas etching reaction of a transparent conductive material. The method uses a template to block the reaction gas from entering other parts , after etching, the template can be easily removed, but in production, it needs to use a transparent conductive electrode processing device, the preparation process is cumbersome and slow

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  • A kind of preparation method of transparent conductive electrode
  • A kind of preparation method of transparent conductive electrode
  • A kind of preparation method of transparent conductive electrode

Examples

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Effect test

Embodiment 1

[0037] The preparation method of the transparent conductive electrode of the present embodiment, such as figure 1 shown, including the following steps:

[0038] 1) On the transparent PET (polyethylene terephthalate) film, scrape and coat the mixed dispersion liquid of nano-silver wire, modified cellulose and surfactant, and make the nano-silver wire conductive layer after drying; The diameter of the nano-silver wire is 10-100nm; the square resistance of the nano-silver wire conductive layer is 50ohm / sq;

[0039]2) Make a patterned screen printing screen: screen-print a patterned barrier layer on the surface of the nano-silver wire conductive layer. The lamp is cured to form a barrier layer, and a single-sided pressure-sensitive tape is attached to the position of the electrode lead-out line for protection, and the conductive layer of the nano-silver wire that is not covered forms a reaction area;

[0040] 3) Put it into the gas doping equipment that can control the temperatu...

Embodiment 2

[0043] The preparation method of the transparent conductive electrode of this embodiment comprises the following steps:

[0044] 1) On the transparent colorless PI (polyimide resin) film after corona, slit extrusion coating mixed dispersion liquid of nano-silver wire, modified cellulose and surfactant, and make nano-silver after drying wire thin film conductive layer; the diameter of the nano-silver wire is 10-100nm;

[0045] 2) Compounding a photoresist film containing nano-copper powder and silicon dioxide filler on the surface of the conductive layer of the nano-silver wire film, through exposure and development, a photoresist barrier layer is formed, and the unshielded nano-silver wire conductive layer forms a reaction area;

[0046] 3) Put it into the gas doping equipment that can control the temperature, air flow, and reaction gas concentration, and use high-pressure air as the carrier gas to introduce a small amount of hydrogen sulfide gas. On the surface of the nano-si...

Embodiment 3

[0048] The preparation method of the transparent conductive electrode of this embodiment comprises the following steps:

[0049] 1) On the transparent PET film after corona, slit extrusion coating is coated with the mixed dispersion liquid of nano-silver wire, modified cellulose and surfactant, after drying, make the conductive layer of nano-silver wire film;

[0050] 2) Composite a photoresist film containing nano silicon dioxide on the surface of the silver nano wire conductive layer, and form a photoresist barrier layer by exposure and development, and the unshielded area forms a reaction area;

[0051] 3) Put it into the ion implantation equipment, the ion source is boron trifluoride, phosphine and arsine, etc. After ionization, boron B ions and hetero ions are formed, which are purified by a magnetic analyzer, and the required boron ions are passed through an electric field Accelerate, obtain high kinetic energy, and deflect injection molding onto the surface of the condu...

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Abstract

The present invention relates to the technical field of conductive electrodes and in particular to a method for preparing a transparent conductive electrode. The method for preparing the transparent conductive electrode comprises the steps of 1) disposing a nano metal conductive layer on the surface of a transparent substrate; 2) performing patterned shielding on the nano metal conductive layer inthe step 1) to form a barrier layer on the surface of the nano metal conductive layer, and forming a reaction region on the unshielded nano metal conductive layer; 3) introducing a gas containing a doping etchant into the reaction region or implanting impurity ions into the reaction region in order that the nano metal conductive layer in the reaction region reacts with the gas containing the doping etchant each other or is doped with the impurity ions to form a non-conductive region, and obtaining the transparent conductive electrode after the reaction ends. The preparation method of the transparent conductive electrode, by using the characteristics that the nano metal material has a large specific surface area, and is liable to adsorb impurities, is easy to break, and is likely to lose conductivity, achieves directional doping to form a patterned transparent electrode, and is simple and low in cost.

Description

technical field [0001] The invention relates to the technical field of conductive electrodes, in particular to a preparation method of a transparent conductive electrode. Background technique [0002] At present, the materials of transparent electrodes mainly include transparent conductive oxide films, carbon nanotubes, graphene, conductive polymers, metal grids, metal nanowires, etc. ITO transparent electrodes occupy most of the market share due to their high transparency and high conductivity. However, ITO electrodes need to be prepared by vacuum vapor deposition and contain the rare element indium, so the cost is high, and ITO is brittle and cannot be used in flexible devices. Therefore, people began to look for other transparent electrode materials. Metal nanowires are favored because of their lower cost, higher performance, and good adaptability to flexible devices, and they have become the most accepted product in the market. In addition, the combination of nano meta...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B5/14H01B13/00
Inventor 雷贝
Owner NUOVO FILM SUZHOU CHINA INC