Nanocomposite energetic film and preparation method thereof
A nano-composite and thin-film technology, applied in the direction of nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the unsolved problems of integration and safety, charge and sensitivity, etc. to meet the stability requirements and improve the explosion performance
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[0030] First, use a mixed acid solution to remove organic impurities and metal impurities on the surface of the silicon wafer, and then soak the base silicon wafer in acetone, alcohol and ultrapure water for 20 minutes for ultrasonic cleaning. After cleaning, use an ear cleaning ball to blow off the water droplets on the surface of the silicon wafer , dry for later use.
[0031] Paste the cleaned silicon wafer on the circular sample stage with double-sided tape to ensure good adhesion between the silicon wafer and the substrate, then fix the titanium target and aluminum target on the target, and close the vacuum chamber hatch . Turn on the circulating condensate, turn on the main power supply, mechanical pump, side pump valve, compound vacuum gauge, flow meter, radio frequency source power switch, and molecular pump main power supply in sequence. When the reading of the vacuum gauge shows 8Pa, switch the side pumping valve, turn on the molecular pump, and then fully open the ...
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