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Nanostructured block copolymer film comprising a biodegradable polyester block

A technology of block copolymers and nanostructures, which is applied in the direction of photolithography, instruments, and optomechanical equipment on the patterned surface, and can solve the problems of unmentioned morphology of nano domains and too long period.

Inactive Publication Date: 2019-06-04
ARKEMA FRANCE SA +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0018] However, such a period is still too long to use such block copolymer films as nanolithographic etch resists via directed self-assembly (DSA) for next-generation applications in organic electronics.
Furthermore, the document only demonstrates a single layered morphology and does not mention any possibility of controlling the morphology of the nanodomains as a function of the composition of the block copolymer

Method used

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  • Nanostructured block copolymer film comprising a biodegradable polyester block
  • Nanostructured block copolymer film comprising a biodegradable polyester block
  • Nanostructured block copolymer film comprising a biodegradable polyester block

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0077] Embodiment 1 (comparison): Poly(ε-caprolactone) 43 -block- LBH-P3000-block-poly(ε-hexyl ester) 43 Preparation of triblock copolymers

[0078] Weigh the macroinitiator ( LBH-P3000, 2eq. (equivalent), 1.5g) and ε-CL (80eq., 4.11g) were introduced into a dry Schlenk flask. Place the Schlenk flask under a controlled argon atmosphere, and then add solvents (9ml of toluene, [ε-CL] 0 =4 mol / l) and methanesulfonic acid (1 eq., 78 μl). The reaction medium is stirred at 30° C. for 2 h 30 under argon. Once the monomer is fully consumed (by 1 H NMR monitoring to determine), just add excess diisopropylethylamine (DIEA) to neutralize the acid catalyst. The solvent was then evaporated under vacuum. The obtained polymer was then dissolved in a minimum amount of dichloromethane, then precipitated by adding to cold methanol, filtered and dried under vacuum.

[0079] The polymerization reaction of ε-CL monomer and macroinitiator is as follows:

[0080]

[0081] The r...

Embodiment 2

[0086] Embodiment 2 (comparative): Poly(ε-caprolactone) 80 -block-Krasol LBH-P3000-block-poly(ε-caprolactone) 80 Preparation of triblock copolymers

[0087] Macroinitiator (Krasol LBH-P3000, 2 eq., 1.5 g) and ε-CL (160 eq., 8.22 g) were weighed in a glove box and introduced into a dry Schlenk flask. Place the Schlenk flask under a controlled argon atmosphere, and then add solvents (18 ml of toluene, [ε-CL] 0 =4 mol / l) and methanesulfonic acid (1 eq., 156 µl). The reaction medium is stirred at 30° C. for 2 h 30 under argon. Once the monomer is fully consumed (by 1 H NMR monitoring to determine), just add excess diisopropylethylamine (DIEA) to neutralize the acid catalyst. The solvent was then evaporated under vacuum. The obtained polymer was then dissolved in a minimum amount of dichloromethane, then precipitated by adding to cold methanol, filtered and dried under vacuum.

[0088] The results obtained are as follows:

[0089] Get PCL 80 -b-Krasol-b-PCL 80 Trib...

Embodiment 3

[0093] Example 3: Poly(β-butyrolactone) 75 -block-Krasol LBH-P3000-block-poly(β-butyrolactone) 75 Triblock Copolymer Preparation

[0094] Macroinitiator (Krasol LBH-P3000, 2 eq., 1.27 g) and β-BL (160 eq., 5.25 g) were weighed in a glove box and introduced into a dry Schlenk flask. The Schlenk flask was placed under a controlled argon atmosphere, and the solvents (4.6 ml of toluene, [β-BL] 0 =7 mol / l) and trifluoromethanesulfonic acid (2eq., 91μl). The reaction medium is stirred at 30° C. for 3 h 30 under argon. Once the β-BL monomer is completely consumed (by 1 H NMR monitoring to determine), just add excess diisopropylethylamine (DIEA) to neutralize the acid catalyst. The solvent was then evaporated under vacuum. The obtained polymer was then dissolved in a minimum amount of dichloromethane, then precipitated by adding to cold methanol, filtered and dried under vacuum.

[0095] The polymerization reaction of β-BL monomer and macroinitiator is as follows:

[0096...

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Abstract

The invention concerns a block copolymer film nanostructured into nanodomains, said copolymer comprising at least a first biodegradable polyester block and a second block of a different chemical nature to that of the first block, said block copolymer being characterised in that the first polyester block is polybutyrolactone (PBL) and in that the second block is from a polymer carrying a hydroxy function on at least one end and acting as a macroinitiator for the polymerisation of beta-butyrolactone (BBL) into polybutyrolactone (PBL).

Description

technical field [0001] The present invention relates to the field of nanostructured block copolymers having nanodomains oriented in specific directions. [0002] More specifically, the present invention relates to a block copolymer film comprising at least one biodegradable block of polyester type which can be easily eliminated after structuring and has a high phase segregation (phase segregation, phase separation), with a small L 0 period, preferably less than 20nm. [0003] The term "period", which is denoted L in the remainder of this specification 0 , is intended to represent the smallest distance separating two adjacent domains of the same chemical composition separated by domains of different chemical composition. Background technique [0004] The development of nanotechnology has made it possible to continuously miniaturize products in the field of microelectronics and in particular microelectromechanical systems (MEMS). Currently, conventional lithography (lithog...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08G63/08G03F7/00
CPCC08G63/08G03F7/0002C08G64/183C08G77/445G03F7/038G03F7/039G03F7/0757
Inventor C.纳瓦罗D.保里索B.马丁-瓦卡A.科芬F.凯泽
Owner ARKEMA FRANCE SA