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Curtain-formed fluid supply device

A technology of supplying device and fluid, applied in the field of fluid curtain supplying device, can solve the problem of uneven cleaning and the like

Inactive Publication Date: 2019-07-12
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this substrate cleaning, the problem of uneven cleaning often occurs

Method used

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  • Curtain-formed fluid supply device
  • Curtain-formed fluid supply device
  • Curtain-formed fluid supply device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0033] The fluid curtain supply device of the first embodiment is an IPA supply device 20 used in the coating treatment tank 11 .

[0034] The coating treatment tank 11 is a tank for coating a thin film of isopropyl alcohol (IPA29) as a pretreatment material on the substrate 100 in a dry state before washing with water. An IPA knife 21 (IPA supply device 20 ) connected to an IPA supply pipe 24 is provided above the coating treatment tank 11 , that is, above the carried-in liquid crystal substrate 100 , on the upstream side in the transport direction. The IPA knife 21 discharges the IPA 29 in a curtain shape on the upper surface of the liquid crystal substrate 100 . The IPA supply pipe 24 and the IPA knife 21 are formed of a material subjected to an IPA-resistant treatment.

[0035] The inside of IPA knife 21 comprises IPA storage part 22, and described IPA storage part 22 is along the board surface (XY plane) of substrate 100 for liquid crystal and is perpendicular to conveyi...

no. 2 approach

[0048] The fluid curtain supply device of the second embodiment is the air supply device 30 used in the coating treatment tank 11 .

[0049] As the downstream side of the above-mentioned IPA knife 21, the air knife 31 (air supply device 30) connected to the air supply pipe 34 is provided covering the exit vicinity of the processing tank 11. As shown in FIG. The air knife 31 includes the same as the IPA knife 21: along the plate surface (XY plane) of the substrate 100 for liquid crystal and perpendicular to the conveying direction, and an air reservoir extending elongately in the width direction (direction Y) of the substrate 100 for liquid crystal. The part 32 discharges clean dry air (an example of a fluid) in a curtain shape on the liquid crystal substrate 100 from a slit provided below the air storage part 32 . Unlike the IPA knife 21 , the air knife 31 is not inclined obliquely, and is vertically installed with respect to the substrate 100 for liquid crystal.

[0050] The...

no. 3 approach

[0055] The fluid curtain supply device of the third embodiment is the pure water supply device 40 used in the substitution tank 12 .

[0056] A water knife 41 (pure water supply device 40 ) connected to a pure water supply pipe (not shown) is provided above the replacement tank 12 , that is, above the liquid crystal substrate 100 carried in by the transport device 15 . The pure water supply device 40 has the same form as the above-mentioned IPA supply device 20 , but differs from the IPA supply device 20 only in that the material is not subjected to the IPA-resistant treatment. The other configurations are all the same, so repeated descriptions are omitted. Pure water for replacement (an example of a fluid) that is jetted onto the liquid crystal substrate 100 is jetted from the pure water supply device 40 .

[0057] In addition, on the downstream side of the pure water supply device 40 , a shower pipe 50 made of resin is provided. The shower pipe 50 is composed of a plurality...

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PUM

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Abstract

The invention provides a curtain-formed fluid supply device, which can uniformly provide fluid and prevents fluid separation. The curtain-formed fluid supply device includes a storing section (22) forstoring IPA (29), an elongated slit (23) through which the IPA (29) stored in the storing section (22) is supplied in a curtain form, at least three supply pipes (24) that supply the fluid to the storing section (22), and a flow control valve (26), which is disposed at each of the at least three supply pipes and controls a flow amount of the IPA (29). One of the at least three supply pipes is connected to a middle section of the storing section (22) with respect to an extending direction of the elongated slit (23) and two of the at least three supply pipes are connected to two end sections ofthe storing section (22) with respect to the extending direction.

Description

technical field [0001] The present invention relates to a fluid curtain supply device that discharges or ejects liquid or gas in a curtain shape. Background technique [0002] Conventionally, for example, in the manufacture of a liquid crystal panel, which is a main component of a liquid crystal display device, foreign matter adhering to the surface of the substrate should be removed and the surface of the substrate should be cleaned with a cleaning solution such as pure water. In this substrate cleaning, the problem of uneven cleaning often occurs. [0003] As a method of suppressing cleaning unevenness, there is a method of uniformly supplying a cleaning solution to the substrate surface. Specifically, the cleaning liquid can be discharged in a so-called liquid curtain shape by the water jet, thereby suppressing uneven cleaning. [0004] prior art literature [0005] patent documents [0006] Patent Document 1: JP-A-7-77677 Contents of the invention [0007] Technic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67B08B3/02B08B3/08G02F1/13
CPCH01L21/67051B08B3/02B08B3/08G02F1/13G02F1/1316B08B3/022B08B3/041G02F1/1303
Inventor 谷池康司郎
Owner SHARP KK