High reliability marine turbulence sensing device
A sensing device and reliable technology, applied in the field of ocean turbulence detection, can solve the problems of thin detection information, high price, low spatial resolution, etc., and achieve the effects of balanced sensitivity and reliability, easy fabrication and simple structure
Active Publication Date: 2021-10-08
ZHONGBEI UNIV
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Problems solved by technology
Due to the current commonly used shear flow probes have the disadvantages of low spatial resolution, thin detection information and high price.
The MEMS silicon cross-beam sensitive probe can effectively solve the above problems; however, because the cilia are directly exposed to seawater in the deep sea, they are easily damaged. A packaged sensing device that does not reduce the sensitivity and spatial resolution of the sensor and protects it from damage becomes more urgent
Method used
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[0022] In order to enable those skilled in the art to better understand the present invention, the present invention will be further clearly and completely described below in conjunction with reference to the accompanying drawings and in conjunction with embodiments. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.
[0023] Such as Figure 1 to Figure 3 As shown, a high-reliability marine turbulence sensing device includes a silicon cross beam sensitive chip 1 , a rubber cap 3 , a shroud 4 and a supporting shell 2 .
[0024] The silicon cross beam sensitive chip 1 includes a rectangular fixed frame, and the center of the rectangular fixed frame is fixed with a quality block through the silicon cross beam, and the center of the mass block is vertically fixed with cilia extending upward; the cilia of the silicon cross beam sensitive chip 1 and the silicon cross bea...
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Abstract
The invention is a high-reliability ocean turbulence sensing device, which comprises a silicon cross beam sensitive chip, a rubber cap, a diversion cover and a supporting shell; the silicon cross beam sensitive chip is fixed on the supporting shell, and the rubber cap is buckled on the silicon cross beam The crossbeam sensitive chip is outside and fixed with the support shell, the shroud is buckled outside the rubber cap and fixed with the support shell, the top of the rubber cap is extended upwards with a rubber probe that penetrates the shroud and extends to the outside of the shroud, Several permeable holes are arranged on the supporting shell. The device of the invention aims at the problem that the sensitive structure of silicon cross beam cilia is extremely easy to be damaged in the deep sea, and is developed on the basis of ensuring that the sensitivity and spatial resolution are not reduced. The device of the invention has scientific design, simple structure and easy manufacture, and realizes the balance of spatial resolution, sensitivity and reliability of turbulence detection.
Description
technical field [0001] The invention relates to the technical field of ocean turbulence detection, in particular to a highly reliable ocean turbulence sensing device. Background technique [0002] Turbulence is the constant movement in the ocean. Turbulent flow is diffuse, random, isotropic, continuous and dissipative. Ocean turbulence plays an important role in both ocean thermohaline circulation and ocean energy conversion. The development of turbulence sensors and the improvement of their reliability are inseparable from the verification and update of ocean turbulence detection and theory. [0003] The environment of the deep sea is changeable, and human beings still know little about it. Therefore, more stringent requirements are also provided for deep-sea detection turbulence sensors. Due to the technical limitations of professional instruments, ocean turbulence detection activities cannot obtain more range and multi-dimensional measurement data. Therefore, turbule...
Claims
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IPC IPC(8): G01C13/00
CPCG01C13/002
Inventor 王任鑫薛晨阳申玮张国军郑永秋张文君廉宇琦
Owner ZHONGBEI UNIV