Remote control radio frequency power matching system for radio frequency electronic generator
An electronic generator, radio frequency power technology, applied in electrical components, impedance network, single-ended network and other directions, can solve the problems of troublesome operation, human body radiation, low efficiency, etc., to achieve convenient implementation, strong applicability and low cost Effect
Pending Publication Date: 2019-08-16
常州鑫立离子技术有限公司
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Problems solved by technology
The existing RF power matching system uses manual adjustment knobs to adjust the capacitance of the adjustable capacitors C1, C2, and C3 on the spot. On the one hand, the operation is cumbersome and the efficiency is low. On the other hand, it has radiation to the human body and affects the operation. staff health
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Embodiment 1）
[0017] See Figure 1 to Figure 4 , the remote control radio frequency power matching system for the radio frequency electronic generator of the present embodiment mainly consists of a housing 1, a radio frequency power input connector 2, an aviation connector 3, an adjustable capacitor C1, an adjustable capacitor C2, an adjustable capacitor C3, and a vacuum relay 4 , Starter oscillation drive plate 5, electrode group 6, drive motor group 7, high-voltage insulating coupling 8 and control device. The control device includes a motor controller 9 and a remote controller 10; the electrode group 6 includes a first power supply electrode 61, a second power supply electrode 62 and a radio frequency power output electrode 63; the drive motor group 7 includes a first drive motor 71 and a second drive motor 72 And the third drive motor 73.
[0018] The RF power input connector 2 is fixedly arranged on the housing 1, and the RF power input connector 2 is used to input the RF power of the...
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The invention provides a remote control radio frequency power matching system for a radio frequency electronic generator. The device comprises a radio frequency power input connector, an aviation connector, three adjustable capacitors used for carrying out matching modulation on input radio frequency power, a vacuum relay used for controlling switching of one adjustable capacitor, an electrode group used for being connected with a rear-end radio frequency electronic generator in use, and a lighting oscillation driving plate used for oscillation. The system further comprises a motor controllerwhich is used for driving the three adjustable capacitors to adjust capacitance values and comprises three driving motors and matched high-voltage insulation couplings, and used for controlling the three driving motors, and a remote controller which is used for sending forward and reverse rotation instructions of the driving motors to the motor controller at a far end. When in use, the three adjustable capacitors can be conveniently and remotely adjusted by using a remote controller to match and modulate the input radio frequency power, so that the use is convenient, the efficiency is improved, and an operator can be prevented from being radiated to influence the body health.
Description
technical field [0001] The invention relates to the field of radio frequency electronic generators, in particular to a remote control radio frequency power matching system for radio frequency electronic generators. Background technique [0002] RF electron generators are often used in the semiconductor industry and vacuum coating industry to generate ions to be used. The RF electron generator device generally includes a front-end RF power source, an intermediate RF power matching system, and a back-end RF electron generator. In this type of device, the RF power matching system is used to adjust the RF power matching coupling of the front-end input to the best and then deliver it to the RF electronic generator at the rear end. See figure 2 and Figure 4 At present, the commonly used RF power matching system mainly includes RF power input connector 2, aviation connector 3 for power input, 3 adjustable capacitors C1, C2, and C3 for power matching coupling, and adjustable capac...
Claims
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IPC IPC(8): H03H5/02
CPCH03H5/02
Inventor 陈晓东
Owner 常州鑫立离子技术有限公司