Preparation method of three-dimensional nano antenna array
A technology of nano-antennas and antenna arrays, applied in antenna arrays, devices for manufacturing antenna arrays, antennas, etc., can solve the problems of restricting metamaterial research and application development, low processing efficiency, and increasing the cost and time of metamaterial preparation. Stable applicability, improved processing efficiency, high consistency and repeatable effects
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[0027] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0028] The following examples are intended to describe the present invention in further detail, are exemplary only, and are not intended to limit devices made in accordance with the present invention to the materials, conditions, or process parameters described herein.
[0029] (1) Using MEMS technology to prepare a suspended film on a silicon substrate, the film material is the upper layer of 100nm gold and the lower layer of 30nm silicon nitride;
[0030] (2) Use drawing software to draw figure 1 The 2D expanded array graph shown and figure 2 , image 3 The three-dimensional transformation graphics shown;
[0031] (3) the graphics drawn in step (2) are all converted into the required data stream format of the FIB instrument and imported into the FIB processing software respectively;
[0032] (4) FIB processing is performed on the prepared suspensio...
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