Preparation method of three-dimensional nano antenna array

A technology of nano-antennas and antenna arrays, applied in antenna arrays, devices for manufacturing antenna arrays, antennas, etc., can solve the problems of restricting metamaterial research and application development, low processing efficiency, and increasing the cost and time of metamaterial preparation. Stable applicability, improved processing efficiency, high consistency and repeatable effects

Active Publication Date: 2019-09-20
PEKING UNIV
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Problems solved by technology

[0004] However, since this FIB-SID processing technology can only be performed in series, the processing efficiency is very low, which gre

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  • Preparation method of three-dimensional nano antenna array
  • Preparation method of three-dimensional nano antenna array
  • Preparation method of three-dimensional nano antenna array

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[0027] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0028] The following examples are intended to describe the present invention in further detail, are exemplary only, and are not intended to limit devices made in accordance with the present invention to the materials, conditions, or process parameters described herein.

[0029] (1) Using MEMS technology to prepare a suspended film on a silicon substrate, the film material is the upper layer of 100nm gold and the lower layer of 30nm silicon nitride;

[0030] (2) Use drawing software to draw figure 1 The 2D expanded array graph shown and figure 2 , image 3 The three-dimensional transformation graphics shown;

[0031] (3) the graphics drawn in step (2) are all converted into the required data stream format of the FIB instrument and imported into the FIB processing software respectively;

[0032] (4) FIB processing is performed on the prepared suspensio...

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Abstract

The invention discloses a preparation method of a three-dimensional nano antenna array, and belongs to the technical field of micron/nano processing. According to the method, drawn two-dimensional expanded array pattern and three-dimensional conversion pattern are used; firstly, FIB is applied to a suspension film to etch out a two-dimensional nano antenna array structure; and then, an FIB-SID technology is applied for converting the structure into the three-dimensional array structure according to the three-dimensional conversion pattern. The nano antenna array is prepared by adopting the FIB-SID technology; the process method is simple and stable, and the applicability to a material is wide; efficient large-scale three-dimensional array structure processing can be realized; and the research and application of large-scale three-dimensional metamaterial device formation are promoted.

Description

technical field [0001] The invention relates to the field of micro / nano processing technology and nanophotonics, and in particular to a preparation method of a three-dimensional nano-antenna array based on focused ion beam (Focused ion beam, FIB). Background technique [0002] In recent years, with the rapid development of various new technologies such as controllable growth, self-assembly, and micro-nano-fabrication, a kind of artificially fabricated periodic arrays of "superatoms"—metamaterials—has gradually become the focus of researchers. Through the design and processing of special array structures with some physical properties that do not exist in nature, specific physical functions can be realized, such as special responses to electromagnetic waves, etc. This field brings a wide range of applications. The constituent units of these metamaterials are usually in the micrometer to nanometer scale, especially three-dimensional metamaterials, which require high processing...

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Application Information

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IPC IPC(8): H01Q21/00H01Q15/00
CPCH01Q15/0086H01Q21/0087
Inventor 吴文刚陈小瑜金生霄
Owner PEKING UNIV
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