A high-temperature-resistant, high-sensitivity flexible silicon carbide-based temperature sensor and its manufacturing method
A temperature sensor, silicon carbide-based technology, used in thermometers, thermometers, instruments, etc., which are directly sensitive to heat-sensitive electrical/magnetic components, can solve the problems of high working temperature and large volume, and prevent deterioration, failure, increase Thermoelectric signal, realize the effect of flexible installation
Active Publication Date: 2021-09-24
XI AN JIAOTONG UNIV
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Problems solved by technology
[0004] Traditional thermocouple temperature sensors generally use galvanic wire as the core working part. The working temperature is high, but the volume is large, and it is difficult to apply to special industrial needs.
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[0033] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", "side", "end", "side" etc. is based on the Orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, in the description of the present invention, unless otherwise specified, "plurality" means two or more.
[0034] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connecti...
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Abstract
The invention discloses a high temperature-resistant and high-sensitivity flexible silicon carbide-based temperature sensor and a manufacturing method, including woven composite toughened silicon carbide fiber as a toughened silicon carbide flexible fiber substrate and tungsten bonded on the front of the toughened silicon carbide flexible fiber substrate The composition of rhenium alloy film; the tungsten-rhenium alloy film is connected with the tungsten-rhenium alloy wire by thermal spraying, and the surface of the tungsten-rhenium alloy film is coated with lanthanum strontium cobalt oxide powder. Based on the thermoelectric effect, the invention can output the temperature in the form of an electrical signal under high temperature conditions, and realize the temperature measurement through the relationship between the temperature and the output voltage. In addition, it uses surface film formation technology to miniaturize the structure, and adds lanthanum strontium cobalt oxide powder as a protective layer, which effectively prevents deterioration and failure at high temperatures, and at the same time improves the thermoelectric effect, and improves the sensitivity by increasing the thermoelectric signal. The toughened silicon carbide flexible fiber is used to ensure the overall flexibility while ensuring high temperature work.
Description
technical field [0001] The invention belongs to the technical field of micro-temperature sensor chips, and in particular relates to a high-temperature-resistant, high-sensitivity, flexible silicon carbide-based temperature sensor and a manufacturing method. Background technique [0002] The early thermocouple was invented in 1821. After that, the thermocouple temperature sensor has achieved great success in the fields of steam temperature measurement, thermal response to explosion products, heating, and measuring the surface temperature of high-temperature objects. It has the advantages of simple structure, convenient manufacture, wide measurement range, high precision, small inertia and easy remote transmission of output signals, making it a standardized measurement equipment. Among these sensors, high-temperature temperature sensors play an important role in measuring temperature under harsh operating conditions, and such sensors have achieved success in many different sen...
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IPC IPC(8): G01K7/02
CPCG01K7/02
Inventor 张仲恺田边汪存峰李凯凯蒋庄德
Owner XI AN JIAOTONG UNIV