An ultra-high vacuum degassing device and method

Abstract

The invention discloses an ultrahigh-vacuum degassing device and method. The device comprises a flanged base supported on a corrugated pipe support. A telescopic corrugated pipe is connected to the flanged base. A plurality of ceramic support supporting rods which are fixed are arranged in the center of the corrugated pipe. A ceramic support is connected with a lamp filament. Bonding posts are arranged in the centers of the supporting rods. A corrugated pipe driving mechanism is arranged on the corrugated pipe support and is in threaded connection with a parallel plate support through a driving shaft. A driving handle drives the driving shaft to rotate, a middle parallel plate of the parallel plate support is made to move in the axial direction, accordingly, a flange connected to the rearend of the corrugated pipe is driven to move in the axial direction, the corrugated pipe is driven to move in a telescopic mode, and the lamp filament is driven to stretch and retract along the corrugated pipe. By means of thermal radiation of a vacuum heating source and kinetic energy of hot electrons, the surfaces of cavity walls are heated from the interior of a cavity, and the desorption progress of gas molecules and organic matter adsorbed to the surfaces of the inner walls is remarkably accelerated. By means of the ultrahigh-vacuum degassing device and method, the degassing efficiency inan ultrahigh-vacuum system is improved, and the characteristics of simple structure and easy operation are achieved.

Description

technical field [0001] The invention belongs to the field of ultra-high vacuum technology, and relates to an ultra-high vacuum degassing device and method. Background technique [0002] Ultra-high vacuum (Ultra High Vacuum, UHV) means that the pressure is lower than 10 -7 The vacuum of Pa is mainly used in surface science, semiconductor, particle accelerator and other fields. In order to obtain an ultra-high vacuum, a vacuum chamber and a vacuum pumping system are required. Stainless steel is currently the main structural material for vacuum chambers. [0003] During the installation and maintenance of the ultra-high vacuum system, the chamber will inevitably be broken and exposed to the atmosphere, and a large number of gas molecules or organic substances will be adsorbed on the inner wall surface of the chamber, which will become a source of outgassing that affects the vacuum degree. In order to achieve ultra-high vacuum, it is necessary to bake the cavity at a high tem...

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Problems solved by technology

The above three methods all have their own shortcomings, such as the cumbersome operation of the winding heating belt, which requires certain skills; the baking tent requires a large power and low overall efficiency due to the heating of the space in the entire tent, and it and the winding heating belt are both It needs to be installed and dismantled, and it is extremely inconvenient to use when frequent air breaking is required; although the armored heating wire only needs to be installed once, it increases the complexity and cost of the system, and is not suitable for cavities with complex structures

In addition, these methods all need to maintain a high temperature outside the cavity for a long time, which poses a fire hazard.

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