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Method and device for detecting large-sized micro tubes in semiconductor silicon carbide substrate

A silicon carbide substrate and semiconductor technology, applied in testing semiconductor materials, detecting the appearance of fluid at the leakage point, measuring devices, etc., can solve the problems of low efficiency, time-consuming, unsuitable for production use, etc., and achieve accurate detection High precision and high detection efficiency

Active Publication Date: 2019-10-22
SICC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that it is necessary to find the microtubules existing in the substrate under the microscope and measure the size one by one, which takes a long time and is inefficient, so it is not suitable for production use

Method used

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  • Method and device for detecting large-sized micro tubes in semiconductor silicon carbide substrate
  • Method and device for detecting large-sized micro tubes in semiconductor silicon carbide substrate
  • Method and device for detecting large-sized micro tubes in semiconductor silicon carbide substrate

Examples

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Effect test

Embodiment 1

[0046] Example 1. Large-sized micropipe detection and adsorption device in semiconductor silicon carbide substrate

[0047] Such as figure 1 , 5, 6a and 6b, the large-size microtube detection adsorption device in the semiconductor silicon carbide substrate provided by the present embodiment includes a sample adsorption unit, a vacuum device 7 (such as a vacuum pump), and communicates between the sample adsorption unit and the The vacuum pipeline of vacuum device 7;

[0048] The sample adsorption unit includes a vacuum chuck 1, and the top of the vacuum chuck 1 is provided with a semiconductor silicon carbide substrate adsorption area, and the adsorption area is covered with a plurality of upward and concentric annular grooves 12 ( image 3 and Figure 5 Shown is a circular groove, except for the center, there are 14 circular grooves in total, and annular grooves of other shapes can also be set according to the shape of the semiconductor silicon carbide substrate, such as a ...

Embodiment 2

[0059] Embodiment 2, the application of the detection adsorption device of embodiment 1——the method for detecting large-sized microtubes

[0060] According to the device of Embodiment 1 and the method of use thereof, the method for detecting large-sized micropipes in a semiconductor silicon carbide substrate provided in this embodiment includes the following steps:

[0061] S1. Place the semiconductor silicon carbide substrate to be tested horizontally on the support (the upper surface of the vacuum chuck 1), and the upper surface of the semiconductor silicon carbide substrate to be tested is covered with a detection liquid;

[0062] S2, forming an air pressure difference between the upper surface and the lower surface of the semiconductor silicon carbide substrate to be tested;

[0063] S3. Detecting whether the detection liquid and / or its existing position exist on the lower surface of the semiconductor silicon carbide substrate to be tested and / or on the support;

[0064] ...

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Abstract

The invention discloses a method and a device for detecting large-sized micro tubes in a semiconductor silicon carbide substrate. The method comprises the steps of covering a liquid for detection on the upper surface of a substrate to be detected, forming an air pressure difference between the upper and lower surfaces thereof, and determining number and position situations of the large-sized microtubes in the substrate through detecting whether the liquid for detection exists on the lower surface of the substrate and / or a supporting object thereof and / or existence positions of the liquid fordetection. The device comprises a sample absorption unit, a vacuumizing unit, and a vacuum pipeline communicating the sample absorption unit and the vacuumizing unit, wherein the sample absorption unit comprises a vacuum suction cup, the top part of the vacuum suction cup is provided with a substrate absorption region, a plurality of annular grooves with upward openings are formed in the substrateabsorption region, the vacuum suction cup further has a through hole, and the through hole communicates the substrate absorption region and the vacuum pipeline. The method and the device can determine the number and positions of the large-sized micro tube defectss in semiconductor silicon carbide substrate precisely, have high detection efficiency, and are suitable for large-scale industrial defect detection.

Description

technical field [0001] The invention relates to the field of semiconductor silicon carbide substrate defect detection, in particular to a method and device for detecting large-sized micropipes in a semiconductor silicon carbide substrate. Background technique [0002] Semiconductor silicon carbide single crystal is one of the most important third-generation semiconductor materials. It is widely used in power electronics because of its excellent properties such as large band gap, high saturation electron mobility, strong breakdown field, and high thermal conductivity. , RF devices, optoelectronic devices and other fields. [0003] Micropipes are a common defect in silicon carbide single crystals. Micropipes usually run through the entire crystal along the growth direction of the single crystal, and their sizes range from a few microns to tens of microns. For some larger micropipes (usually greater than 20 μm), the substrate grows and extends to the surface of the epitaxial l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/04G01N33/00
CPCG01M3/04G01N33/00G01N33/0095
Inventor 张红岩宋建张维刚姜岩鹏王雅儒
Owner SICC CO LTD