Dry etching machine pick-and-feed method
A dry etching and etching machine technology, applied in the direction of conveyor objects, comprehensive factory control, program control, etc., can solve the problem of reduced flexibility in the production of dry etching machines, and it is impossible to predict which product of the dry etching machine, which dry method Etching machine capacity waste and other issues, to achieve the effect of reducing waiting time, improving flexibility, and improving production efficiency
Active Publication Date: 2021-05-18
中电九天智能科技有限公司
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Problems solved by technology
[0004] When each process chamber produces different products (including experimental products used in PM), because advanced cleaning machines are required, the mechanical arm cannot predict which product the dry etching machine will use next time, and can only wait for the dry etching machine to clearly inform The type of product required, this causes the cleaning machine to wait every time the dry etching machine produces no chips, and the dry etching machine to wait for idle when the cleaning machine is cleaning, resulting in a decrease in tact time
When it is necessary to increase the tact time, each process cavity in the dry etching machine can only produce the same product, resulting in a reduction in the production flexibility of the dry etching machine. The process chamber will wait to be idle, resulting in waste of production capacity of the dry etching machine
Method used
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[0023] The present invention will be further described below in conjunction with accompanying drawing:
[0024] The BC system actively controls the mechanical arm 2 to take and deliver the film through the acquired information.
[0025] Fetching logic:
[0026] A. The 4 dry etching machines report the status and type information of each process cavity 41 to the BC system, and each process cavity 41 is provided with its own ID serial number;
[0027] B. The BC system lists the process chambers 41 whose state is running / waiting as valid process chambers 41, lists the process chambers 41 whose state is not running / waiting as invalid process chambers 41, and lists the valid process chambers 41 as Sorting by ID number, according to this sorting, the type sorting of the corresponding process cavity 41 is obtained, and the BC system uses this sorting cycle as the basis for the robot arm 2 to take the corresponding type of product from the panel transplanter 1;
[0028] C. When taki...
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The invention discloses a method for taking and feeding sheets of a dry etching machine, which realizes the production of different products in different process cavities of a dry etching machine production line, improves the flexibility of the dry etching machine production line, and improves the tact time of the entire production line at the same time , reducing the waiting time of the robot arm / cleaning machine / dry etching machine, and improving production efficiency; and because this application supports independent production of multiple process chambers, it is guaranteed that one of the process chambers needs to be stopped for non-complete machines During PM, other process chambers can be produced normally, which reduces the maintenance time of the dry etching machine; therefore, this application achieves the maximum balance between the independent production of the process chamber and the improvement of tact time, and realizes the improvement of factory production efficiency and cost reduction , The demand for flexible improvement.
Description
technical field [0001] The invention relates to the technical field of a dry etching machine production line, in particular to a method for taking and feeding sheets of a dry etching machine. Background technique [0002] In the panel manufacturing process, the dry etching machine is a key multi-process chamber machine, and there is a contradiction between improving tact time and independently producing different products in each process chamber. [0003] In the production process of the existing dry etching machine, the production line of the dry etching machine is composed of a panel transplanter, a robot arm, a cleaning machine, and a dry etching machine. The process is that the panel is cleaned from the transplanter through the robot arm to the cleaning machine. Then the robot arm sends the panel to the dry etching machine for dry etching, and finally the robot arm sends the panel back to the transplanter. Each request is initiated by the dry etching machine and informs...
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IPC IPC(8): H01L21/677G05B19/418H01L21/67
CPCG05B19/41875H01L21/67069H01L21/67276H01L21/67703Y02P90/02
Inventor 贺远苗刘丰洋邹良栋
Owner 中电九天智能科技有限公司