A heating device used in vacuum equipment
A heating device and vacuum equipment technology, applied in the shape of heating elements, ohmic resistance heating parts and other directions, can solve the problems of slow heating rate, serious thermionic radiation, large heating table, etc., and achieve high working temperature and heating rate. Fast, precise temperature control
Active Publication Date: 2021-11-16
杭州源位科技有限公司
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Problems solved by technology
These in-situ heating stages have defects such as large volume, overweight, slow heating rate, poor heat insulation effect, and serious thermal electron radiation of the sample, which seriously affect the normal use of scanning electron microscopes. It is necessary to develop fast heating rate, small size, and light weight. , full-featured heating device
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Embodiment
[0062] The invention provides a heating device in vacuum equipment, which includes a heater, an S-type thermocouple 10, a heat-insulating radiation sleeve with a top, a ceramic heat-insulating base 2, a stainless steel base and a thermal electron suppression system.
[0063] The heater includes a heating ceramic core 6, a heating ceramic sleeve 7, a heating wire and a ceramic thermal insulation coating. The upper end of the heating ceramic core 6 has a ceramic cap 601, and the center is provided with a through hole 603 for introducing the S-type thermocouple 10. The ceramic cap 601 is provided with a groove 602 embedded in the sample for heating; the heating ceramic sleeve 7 is a flange pipe structure , the outer diameter of which is the same as that of the ceramic cap 601 of the heating ceramic core 6; the heating ceramic core 6 is coaxially set on the heating ceramic sleeve 7. The heating wire includes a first heating wire 8 and a second heating wire 9, and the material is t...
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The invention discloses a heating device used in vacuum equipment, and relates to the field of heating samples in vacuum equipment. The heating device includes: a heating component, the heating component is a dual heat source heating component, used to heat the sample to be heated; a heat insulating component, the heat insulating component includes a three-layer roof heat-insulating radiation shielding structure and a ceramic heat-insulating base , used for heat insulation treatment; the support part, the support part is a stainless steel base, used to support the heating part and the heat insulation part; the thermal electron suppression system, the thermal electron suppression system is used to suppress the thermal electrons on the surface of the sample to be heated escape. The invention is suitable for use in vacuum preparation, especially in scanning electron microscopy. The device has the advantages of small size, high heating efficiency, fast temperature rise, good heat insulation effect of heat source sealing, effective control of the influence of thermal electrons on the electron beam of the scanning electron microscope, clear high-temperature images, and does not affect the normal use of other accessories of the scanning electron microscope.
Description
technical field [0001] The invention relates to the field of heating samples in vacuum equipment, in particular to a desktop scanning electron microscope and a heating device used in vacuum equipment in the scanning electron microscope. Background technique [0002] When the material is served at high temperature, microstructural instability is one of the key reasons leading to the failure of service performance. This is especially prominent for metal materials serving under high temperature conditions. In order to study the evolution mechanism of the microstructure of materials in service at high temperatures, some experimental devices for the evolution of materials microstructures under pseudo-high temperature conditions have been developed and applied. Optical microscope (OM), especially scanning electron microscope (SEM) is the main analytical instrument for testing and analyzing the microstructure of metal materials, which promotes the rapid development of in-situ heat...
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IPC IPC(8): H05B3/02H05B3/44
CPCH05B3/02H05B3/44
Inventor 李吉学党理
Owner 杭州源位科技有限公司