Dicing saw, and contact height measuring device and height measuring method thereof
The technology of a height measuring device and a dicing machine is applied in the direction of a mechanical measuring device, a measuring device, and a mechanical device. The effect of easy installation
Active Publication Date: 2019-11-22
光力瑞弘电子科技有限公司
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Problems solved by technology
[0005] The purpose of the present invention is to provide a dicing machine height measuring device to solve the problem that the current dicing machine height measuring device needs the scribing knife to conduct electricity. dicing machine, to solve the problem that the current dicing machine cannot be used for the small adaptability caused by the insulating scribing knife; in addition, the purpose of the present invention is to provide a method for measuring the height of the dicing machine, so as to solve the problem that the current dicing machine cannot The problem of small adaptability caused by the application of insulating scribing knife
Method used
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Embodiment Construction
[0056] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0057] The specific embodiment of the dicing machine of the present invention, as Figure 1 to Figure 8 As shown, the dicing machine includes a frame, a workbench 2, and a workpiece carrying plate 3 arranged on the workbench 2. The workpiece carrying plate 3 has a workpiece carrying surface 31 for carrying workpieces to be cut. The workpiece carrying surface 31 in this embodiment The disk 3 is a ceramic disk, and the workpiece to be cut is a wafer 70 fixed on the ceramic disk by vacuum adsorption to ensure the stability of the workpiece during cutting. The frame is equipped with a main shaft moving mechanism and a main shaft arranged on the main shaft moving mechanism. The main shaft is used to install and drive the scribing knife 5. The main shaft moving mechanism is used to drive the main shaft to move along the Z and Y directions. The mobile is assem...
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The invention relates to a dicing saw, and a contact height measuring device and height measuring method thereof. The dicing saw comprises a workbench, a workpiece bearing disc, a main shaft, the height measuring device and a control system; and the height measuring device is arranged on the workbench or the workpiece bearing disc, and comprises a height measuring body and an accelerometer, t he height measuring body includes a height measuring surface which makes contact with a scribing knife to measure the height, the accelerometer is triggered when the scribing knife is in contact with theheight measuring body, vibration can be transmitted between the accelerometer and the height measuring body, and the control system determines contact between the height measuring body and the scribing knife by detecting the vibration of the height measuring body. Compared with an existing height measuring device, the height measuring device on the dicing saw completes height measurement through detection cooperation between the height measuring body and the acceleration sensor, a conductive loop does not need to be formed, there is no requirement for the conductive performance of the dicing saw, and the problem that an existing dicing saw cannot be suitable for an insulating scribing knife and consequently the application range is small is solved.
Description
technical field [0001] The invention relates to a dicing machine, a dicing machine contact height measuring device, and a dicing machine height measuring method. Background technique [0002] The dicing machine is an important processing equipment in the field of semiconductor packaging and processing technology. At present, the grinding wheel dicing machine is widely used in the market. The high-speed rotating diamond scribing knife on the grinding wheel dicing machine will continue to wear during use. If the dicing Without adjusting the height of the knife, the cutting depth on the workpiece will gradually become shallower. In order to ensure the accuracy of the measurement results, it is necessary to detect the wear degree of the scribing knife online, and adjust the height of the spindle relative to the worktable according to the wear of the scribing knife. The height measuring device measures the height of the scribing knife through the height measuring device, and adj...
Claims
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IPC IPC(8): G01B5/06
CPCG01B5/061
Inventor 赵彤宇石云鹏司亚辉孙亚辉郑海全
Owner 光力瑞弘电子科技有限公司