Method for preparing ultrafine grain steel ESD sample
A technology of ultra-fine crystals and samples, which is applied in the preparation of test samples, sampling, and measuring devices. It can solve the problems of high price, difficult process, and low efficiency of focused ion beam sample preparation, so as to improve the success rate and efficiency. , Improve the effect of sample preparation efficiency
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[0025] A kind of preparation method of ultrafine grain steel EBSD sample of the present invention, comprises the following steps:
[0026] S1. Cut a sample with a thickness of 0.3-0.5mm by wire electric discharge cutting, and then use 100, 200, 500, 1000 and 2000 mesh sandpaper to grind the sample to 30-40μm, and then perform mechanical polishing. The force should be uniform, and the surface stress layer should be minimized;
[0027] S2. Clean the polished sample, put the polished sample in acetone for 3 to 5 times, then rinse with ethanol for 2 to 3 minutes, and then dry it with cold wind;
[0028] S3. Use an ion thinner to remove the stress layer on the surface of the polished sample, cut a disc with a diameter of 3 to 4 mm on the polished and cleaned sample, and then carry out ion thinning on the disc on the ion thinner. Thinning instrument current 15 ~ 20μA, thinning time 30 ~ 50min.
Embodiment 1
[0031] The controlled rolling and controlled cooling ultra-fine grain dual-phase steel was cut into a 0.3mm thick sample by wire electric discharge cutting, and then the sample was ground to 30μm with 100, 200, 500, 1000 and 2000 mesh sandpaper, and then the sample was glued Stick it on the grinding table for mechanical polishing, then put the polished sample in acetone for cleaning, then rinse with ethanol, then dry it with cold air, and then cut a 3mm diameter disc on the polished and cleaned sample , and then perform ion thinning on the wafer on the ion thinner, the current of the ion thinner is 15μA, and the thinning time is 50min. The calibration rate of EBSD test reaches 92%, such as figure 1 shown.
Embodiment 2
[0033] The controlled rolling and controlled cooling double grain distribution steel was cut by electric discharge wire cutting to cut a 0.5mm thick sample, and then the sample was ground to 40μm with 100, 200, 500, 1000 and 2000 mesh sandpaper, and then the sample was glued Go to the grinding table for mechanical polishing, then put the polished sample in acetone for cleaning, then rinse with ethanol, and then dry it with cold air, and then cut a 4mm diameter disc on the polished and cleaned sample, Then, the wafer was ion-thinned on an ion-thinner with a current of 20 μA and a thinning time of 30 min. The calibration rate of EBSD test reaches 95%.
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