Semiconductor equipment clamping engineering vehicle

Abstract

The invention discloses a semi-conductor equipment clamping engineering vehicle, which comprises: a horizontal base, which is provided with casters and stoppers; The mechanism is horizontally equipped with a rotating shaft, which is set facing the other side of the horizontal base, and the rotation center of the rotating shaft coincides with the center axis of the horizontal base; The ends are symmetrically connected with cantilevers, and the cantilever is set facing the other side of the horizontal base; the fixing mechanism includes a fixed plate symmetrically arranged on the inner side of the two cantilevers, and the fixed plate is used to suspend and clamp the semiconductor device and fix it between them; wherein, Both the center of mass of the semiconductor device and the center of mass of the fixed plate are at the same height as the center of rotation of the rotating shaft. The invention can effectively ensure the stability during rotation, reduce the occupied area, and ensure the safety of personnel during operation.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing equipment, and more particularly, to a clamping engineering vehicle used for semiconductor integrated circuit testing equipment. Background technique [0002] In the field of semiconductor integrated circuits, it is necessary to use a testing machine for testing at many process nodes. Due to the large size of the testing machine itself, it is usually necessary to use a clamping engineering vehicle to fix the testing head of the testing machine so that it can move a certain distance in the direction of multi-axis to achieve the purpose of cooperating with other equipment. [0003] Due to the heavy weight of the testing machine itself, for the clamping engineering vehicle, in order to ensure that the test head of the testing machine can be displaced to a certain extent in multi-dimensional directions, it is necessary to configure a stable base, so the occupied area is relatively small....

AI Technical Summary

Problems solved by technology

[0003] Due to the heavy weight of the testing machine itself, for the clamping engineering vehicle, in order to ensure that the test head of the testing machine can be displaced to a certain extent in multi-dimensional directions, it is necessary to configure a stable base, so the occupied area is relatively small. Big

At the same time, in order to allow the test head of the testing machine to move to a certain extent in multi-dimensional directions, the clamping engineering vehicle also has many joints, which are difficult to control by electric means; and when using manual adjustment, it is easy to injure the operator. So there is a certain security risk

In addition, there are counterweights on the clamping engineering vehicle, so the overall weight is relatively heavy, and the requirements for the factory floor are also very high.

[0004] At present, among the clamping engineering vehicles on the market, either the structure is complex and the price is high; or the function is single, which cannot meet the needs of the user's environment.

Moreover, these clamping engineering vehicles occupy a large area

Due to the fact that the site that the user can actually provide is very small, the clamping engineering vehicle products on the market at this stage cannot be matched to meet the needs of the customer's site.

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