External incidence type angle sensing measurement device and method of biorthogonal plane mirror based on multi-longitudinal mode self-mixing effect
A technology of angle sensing and measuring devices, which is applied in the field of optical measurement, can solve problems such as applications where measurement cannot be performed, and achieve the effects of simple structure, low environmental interference, and small volume
Inactive Publication Date: 2019-12-31
ANHUI UNIVERSITY
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Problems solved by technology
However, the existing angle measurement devices based on laser self-mixing theory can only realize dynamic angle measurement, and cannot be applied in measurement occasions that require fixed angle measurement and quantitative measurement.
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[0054] combine Figure 1 to Figure 5 , to describe Embodiment 1 of the present invention in detail, but does not limit the claims of the present invention in any way.
[0055] Such as figure 1 As shown, an angle sensing measurement device based on the multi-longitudinal mode self-mixing effect, including a multi-longitudinal mode laser 1, a sensing unit 2, a vibrating target 3, a sliding device 4, a beam splitter 5, a photodetector 6, a signal Preprocessing unit 7 and signal processing unit 8; Sensing unit 2 comprises first turntable 211, second turntable 212, transmission rod 213, intersecting plane mirror 214, first turntable 211 and second turntable 212 rotate synchronously by transmission rod 213, transmission Both ends of the rod 213 are respectively connected with a first connecting column 215 and a second connecting column 216, and the bottom of the first connecting column 215 and the bottom of the second connecting column 216 are respectively arranged on the first tur...
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The invention relates to the technical field of optical measurement, in particular to an external incidence type angle sensing measurement device and method of a biorthogonal plane mirror based on a multi-longitudinal mode self-mixing effect. The device comprises a multi-longitudinal mode laser, a sensing unit, a vibration target, a sliidng device, a beam splitter, a photoelectric detector, a signal preprocessing unit and a signal processing unit; the sensing unit comprises a turntable, a second turntable, a T type transmission bracket, a first crossing plane mirror, a second plane mirror, anorthogonal reflector and a reflector transmission bracket, which are arranged side by side. The device has a simple structure, a small size and a ow cost, can realize non-contact real-time high-precision measurement, the sensing unit is a passive optical sensor, which requires no power supply, furthermore, the optical path of the test device is a single optical path, therefore the environmental disturbance is small, the structure is simple, and the optical path can be conveniently adjusted.
Description
[0001] This application is a divisional application with application number 201810481300.4, application date May 18, 2018, and the title of the invention "Angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect". technical field [0002] The invention relates to the technical field of optical measurement, in particular to a dual-orthogonal plane mirror external incidence angle sensing measurement device and method based on the multi-longitudinal mode self-mixing effect. Background technique [0003] Angle measurement technology is an important part of metrology technology. With the continuous development of science and technology, angle measurement technology has been widely used in opto-mechanical integration, aerospace, military and national defense and other technical fields. [0004] Angle measurement technology mainly includes mechanical angle measurement technology, electromagnetic angle measurement technology and optical angle me...
Claims
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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 吕亮王晨辰杨波陈由泽毕铁柱周俊峰
Owner ANHUI UNIVERSITY