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LNOI-based optical waveguide reverse wedge-shaped spot coupler and preparation method thereof

An optical waveguide, wedge-shaped mode technology, applied in the coupling of optical waveguides, optical waveguides, light guides, etc., can solve the problems of not reaching the optimal transmittance size, no significant improvement, etc., to improve the mode spot matching degree, Efficient coupling and integration-friendly effects

Active Publication Date: 2019-12-31
BEIJING UNIV OF TECH
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

Compared with silicon materials, lithium niobate materials, as artificial synthetic crystal materials, have stronger chemical resistance. The problem of micro-nano processing is a thorny problem that everyone is currently solving. The processing accuracy of silicon materials is relatively mature. There is a big gap, and it is still a challenge for the line width of hundreds of nanometers; therefore, for the inverted tapered waveguide coupling method of the SOI structure, in the LNOI structure, the characteristic size of the inverted tapered shape cannot achieve the best transmittance Size, no significant improvement for efficient coupling of optical waveguide devices to single-mode fibers or optical chips

Method used

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  • LNOI-based optical waveguide reverse wedge-shaped spot coupler and preparation method thereof
  • LNOI-based optical waveguide reverse wedge-shaped spot coupler and preparation method thereof
  • LNOI-based optical waveguide reverse wedge-shaped spot coupler and preparation method thereof

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preparation example Construction

[0037] The invention provides an LNOI-based optical waveguide reverse wedge mode spot coupler and its preparation method. One end of the reverse wedge structure is the cross-sectional size of the single-mode waveguide calculated according to the single-mode conditions, and the other end is the lithium niobate micro-nano processing institute. The minimum line width that can be achieved; on the upper circumference of the reverse wedge structure (the first waveguide core layer), deposit a layer with the highest central refractive index and a gradually decreasing refractive index along the radial direction (light propagation direction) with a gradient change The thin film layer acts as the second waveguide core layer; ordinary single-mode waveguides have a strong confinement effect on light, and the mode field is confined to the center of the waveguide and propagates forward. As the light propagates forward, the width of the waveguide begins to decrease slowly , the confinement eff...

Embodiment 1

[0055] The invention provides an LNOI-based optical waveguide reverse wedge mode spot coupler and a preparation method thereof, including:

[0056] Step 1. Select the LNOI substrate, the structure of which is that the underlying supporting substrate layer 1 is a 500 μm Si layer, and the intermediate insulating layer is 2 μm thick SiO 2 layer, the top layer is a 500 nm thick LN layer. Using insulating layer SiO 2 The large refractive index difference between the LN layer and the LN layer achieves a strong confinement of the transmitted light in the waveguide core layer.

[0057] Step 2. Clean the LNOI substrate. After the LNOI substrate is cut according to the required direction and size, foreign particles and organic oil will adhere to the surface of the wafer, which must be cleaned;

[0058] The specific cleaning is as follows: first put the LNOI substrate into the acetone solution and alcohol solution in sequence, use an ultrasonic cleaner to oscillate and remove large par...

Embodiment 2

[0065] The invention provides an LNOI-based optical waveguide reverse wedge mode spot coupler and a preparation method thereof, including:

[0066] Step 1. Select the LNOI substrate, whose structure is a 400 μm LN layer at the bottom support layer, and the intermediate insulating layer is 2 μm thick SiO 2 layer, and the top layer is a 400 nm thick LN layer. Using insulating layer SiO 2 The large refractive index difference between the LN layer and the LN layer strongly confines the transmitted light in the waveguide core layer;

[0067] Step 2, cleaning the LNOI substrate. After the LNOI substrate is cut according to the required direction and size, impurity particles and organic oil will adhere to the surface of the wafer, which must be cleaned;

[0068] The specific cleaning is as follows: first put the LNOI substrate into the acetone solution and alcohol solution in sequence, use an ultrasonic cleaner to oscillate and remove large particles of dirt on the surface, then u...

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Abstract

The invention discloses an LNOI-based optical waveguide reverse wedge-shaped spot coupler and a preparation method thereof, wherein an LN layer on the top of the LNOI structure is used as a first waveguide core layer, which is in an inverted wedge structure; a second waveguide core layer having a fixed width covers the first waveguide core layer, and the refractive index of the second waveguide core layer is less than that of the first waveguide core layer. The LNOI-based optical waveguide reverse wedge-shaped spot coupler and preparation method thereof provided by the invention utilize the change in height and width of the waveguide structure optical transmission core layer to realize the expansion or compression of incident light in vertical and horizontal directions and to achieve the purpose of efficient coupling of the sub-micron-sized optical waveguide device with the optical chip or single-mode fiber, can realize direct end coupling between the LNOI-based optical waveguide and the optical chip or single-mode fiber and improve the matching degree of the spots of both, and facilitate the integration of large-scale optical paths.

Description

technical field [0001] The invention relates to the technical field of optical interconnection and optical waveguide, in particular to an LNOI-based optical waveguide reverse wedge-shaped mode spot coupler and a preparation method thereof, which are used to realize the interconnection and coupling of an LNOI-based optical waveguide, an optical chip, and a common single-mode optical fiber. Background technique [0002] Lithium niobate crystal (LiNbO 3 , referred to as LN) is a negative uniaxial crystal with non-central symmetry and a wide wavelength transmission range of about 350nm to 5500nm. It has excellent piezoelectric, dielectric, ferroelectric, electro-optic, acousto-optic and Nonlinear optical performance, is the ferroelectric material with the best comprehensive index, and has the title of "optical silicon". The traditional lithium niobate body material is mature and has been widely used in modulators, fiber optic gyroscopes, fiber optic sensors and other fields. L...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/122G02B6/12G02B6/136G02B6/132G02B6/26
CPCG02B6/12G02B6/1228G02B6/132G02B6/136G02B6/26G02B2006/1204
Inventor 王智勇李颖兰天
Owner BEIJING UNIV OF TECH
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