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Dither controller (Dither Controller)

A controller and signal control technology, used in discharge tubes, electrical components, circuits, etc., can solve the problems of unsatisfactory parameter indicators, unsatisfactory performance, complex structure, etc., and achieve easy maintenance, simple structure, and good reliability. Effect

Inactive Publication Date: 2020-01-21
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The dither controller (Dither Controller) acts on the Q3 focusing magnetic lens, so it is necessary to design a dither controller (Dither Controller) with excellent performance. ) has shortcomings such as too complex structure, parameter indicators not meeting requirements, or unsatisfactory performance.

Method used

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Examples

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0017] Such as figure 1 , figure 2 , a dither controller (Dither Controller), the controller needs 220VAC mains power supply, connected to the AC / DC module (1) and switching power supply (2), to provide input power; AC / DC module (1) connected to the servo drive ( 4), providing 50VDC working voltage; the switching power supply (2) is connected to the signal control board (3) to provide the required ±15V, 5V and 24VDC working voltage; the signal control board (3) is connected to an external controller through a connector, which can realize Host computer remote control, receiving 0~10V analog control signal and converting it into -5V~+5V triangular wave control signal, receiving digital signal to realize the output of high and low level enable signal, and feeding back the PWM current of -3V~+3V ...

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PUM

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Abstract

The invention discloses a dither controller (Dither Controller), and belongs to the semiconductor manufacturing field. The dither controller (Dither Controller) comprises an AC / DC module (1), a switchpower supply (2), a signal control board (3) and a servo driver (4). The controller needs to be externally connected with 220V AC commercial power to provide an input power supply for the AC / DC module (1) and the switch power supply (2). The AC / DC module (1) provides a direct current working voltage for the servo driver (4). The switch power supply (2) provides a required working voltage for thesignal control board (3). The signal control board (3) makes the servo driver (4) output a current amplitude, a waveform and a frequency through analog signals, and simultaneously acquires current feedback signals. An external controller exchanges information with the signal control board (3).

Description

technical field [0001] The invention relates to a dither controller of an ion implanter, relates to an ion implanter, and belongs to the field of semiconductor equipment manufacturing. Background technique [0002] The Q3 focusing magnetic lens is placed in the beam line system after the mass analysis magnet and before the parallel lens, which has a great effect on adjusting the beam current. In the process of beam transmission, it plays an important role in improving the beam transmission efficiency by adjusting the focus or defocus of the vertical and horizontal directions of the beam. The dither controller (Dither Controller) acts on the Q3 focusing magnetic lens, so it is necessary to design a dither controller (Dither Controller) with excellent performance. ) has disadvantages such as too complex structure, parameter indicators not meeting requirements, or unsatisfactory performance. Contents of the invention [0003] The present invention provides a dither controll...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/317H01J37/302H01J37/141
CPCH01J37/141H01J37/3023H01J37/3171
Inventor 马少志
Owner BEIJING ZHONGKEXIN ELECTRONICS EQUIP