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Mask plate

A technology of mask board and board body, which is applied in the field of mask board and can solve the problems of adverse effects on other areas of the panel

Inactive Publication Date: 2020-01-24
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present application expects to provide a mask, which is used to solve the shadow effect caused by the warping of the mask in the prior art, so that the formed film is larger than the opening area of ​​the mask, causing damage to other areas around the panel. The problem of adverse effects

Method used

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Embodiment Construction

[0021] The application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. It should also be noted that, for ease of description, only parts related to the invention are shown in the drawings.

[0022] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

[0023] When the mask plate is in use, it is covered on other components to carry out the corresponding process. The side of the mask plate facing the above-mentioned other components is the back side, and the side opposite to the back side is the front side. For example, but not limited to, the ma...

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Abstract

The invention discloses a mask plate. The mask plate comprises a plate body, wherein at least one open area is formed in the plate body; a shielding area is formed around the open area; and counter-weight bulges are arranged in at least a part of the area of the front surface of the shielding area. In the scheme, the counter-weight bulges are arranged in at least a part of the area of the front surface of the shielding area, and under the action of the counter-weight bulges, the problem of buckling of the mask plate can be overcome; and therefore, the shadow effect caused due to the buckling is solved, the formed film is fitted with the open area of the mask plate, and the problem that adverse effects are caused to other areas in the surrounding of a panel because the formed film is largerthan the open area of the mask plate, is overcome.

Description

technical field [0001] The present invention generally relates to the field of display technology, and in particular to a mask plate. Background technique [0002] Organic Light Emitting Diode (OLED) has the characteristics of low power consumption, light weight, high brightness, wide field of view, high contrast and fast response, and is more and more widely used in various display devices. [0003] At present, the main packaging methods for large-size OLEDs include thin-film packaging, glue-coating packaging, and film packaging. Among them, thin film packaging is mainly based on inorganic thin films, such as SiNx, SiON and so on. Inorganic thin films can generally be formed by plasma-enhanced chemical vapor deposition. When depositing and forming a thin-film package, it is necessary to use a mask to define the area where the film grows. However, due to the warpage of the mask, the shadow effect (Shadow Effect) occurs, so that the boundary of the formed film exceeds the b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/04C23C16/513
CPCC23C16/042C23C16/513
Inventor 全威
Owner BOE TECH GRP CO LTD