Device and method for monitoring two-dimensional distribution of charged particle beam

Abstract

The invention relates to a two-dimensional distribution monitoring device and method for a high-current charged particle beam, comprising: a collimation plate, a Faraday cylinder array plate, a measurement plate and a data processing module arranged in sequence; the Faraday cylinder array plate is arranged in an array the first through hole; the measurement board is provided with second through holes arranged in an array, and each second through hole of the measurement board is correspondingly provided with a measurement electrode, and the measurement electrode is used to collect the charged particle beam signal, and transmitted to the data processing module; the data processing module draws the two-dimensional distribution image of the charged particle beam according to the charged particle signal of the measuring electrode and the real-time position information of the measuring electrode; The second through holes are in one-to-one correspondence and arranged coaxially; the third through holes coaxial with the first through holes are arranged on the collimating plate. The invention can monitor the intensity and the two-dimensional distribution image of the charged particle beam at the same time, the test result is more comprehensive, and the situation of the charged particle beam can be better reflected.

Description

Technical field [0001] The present invention relates to a two-dimensional distribution monitoring apparatus and method of charged particle beam, belonging to the field of charged particle beam monitoring. Background technique [0002] The charged particle beam monitor is an important part of the charged particle accelerator, which can be used to monitor the flow strength, position, beam profile, energy of the charged grain beam. Among them, the beam venom contains a stream of streams, center of gravity, size, shape, etc., is a beam parameter that is essential in the process of electroplasia accelerator beams, transmission, and optimization. Currently used beam profile monitoring devices can be divided into projection and non-projecting two categories according to specific measurement. The projection beam profile monitoring device measures one-dimensional stream profile projected in the horizontal direction and the vertical direction, such as residual gas ionization monitoring dev...

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Problems solved by technology

[0003] At present, although the projected beam profile monitoring device can directly obtain the real one-dimensional current intensity distribution of the beam projected in the horizontal and vertical directions by measurement, it needs the two-dimensional beam profile obtained by calculation. The beam profile depends heavily on the reliability and applicability of the calculation algorithm, and the general algorithm contains idealized assumptions about the real situation, so the two-dimensional beam profile obtained according to the calculation does not necessarily reflect the real two-dimensionality of the charged particle beam. beam profile

Although the non-projective beam profile monitoring device can directly measure the two-dimensional profile of the beam, the fluorescent screen monitoring device cannot accurately give the current intensity information of the beam. Fewer Faraday cages are included to truly reflect the true position of the charged particle beam

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