Double acoustic optical modulator-based Michelson heterodyne interferometer displacement measurement method
An acousto-optic modulator and displacement measurement technology, which is applied in the direction of measuring devices, instruments, and optical devices, can solve problems such as the difficulty of adjusting the optical path, and achieve the effect of solving complex optical paths, significant technical advantages, and easy adjustment
Active Publication Date: 2020-03-13
ZHONGBEI UNIV
View PDF8 Cites 2 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0005] In view of this, the purpose of the present invention is to provide a displacement measurement method based on a Michelson heterodyne interferometer with dual acousto-optic modulators, which can measure nanoscale displacement and effectively solve the problem of difficult optical path adjustment
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0026] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0027] The purpose of the present invention is to solve the problems of existing Mach-Zehnder laser heterodyne interference optical path structure and principle, such as difficult optical path adjustment and nonlinear error, and discloses a Michelson heterodyne interference nano-displacement based on dual acousto-optic modulators. The measurement system, through the innovation of the optical path structure, is based on the Michelson interferometer. An acousto-optic modulator is added to each arm, and less optical components are used to realize heterodyne laser interferometry for nanometer displacement. The optical path of the system is simple, and the adjustment is simple and convenient. It is easy to obtain first-order interference fringes, which can effectively solve the problems of complex optical paths and difficult adjustments in the existing technical...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a double acoustic optical modulator-based Michelson heterodyne interferometer displacement measurement method. A Michelson interference structure is adopted, acoustic optical modulators are added to two arms respectively, and frequency shift is generated; the primary interference light spot is converted into an electric signal through a one-dimensional detector, and the electric signal is compared with a reference signal generated by a signal generator by using a phase locker to obtain a phase difference; when an object generates nanometer displacement, a signal light first-order diffraction light spot carries the variable quantity, the phase difference between a first-order interference signal containing the variable quantity and a reference signal is changed, thephase variable quantity caused by the nanometer displacement can be obtained by calculating the variable quantity of the phase difference, and the displacement can be obtained according to the phase difference and a displacement formula. The system is simple in optical path and easy to adjust, can effectively solve the problems of complex optical path, difficult adjustment and the like in heterodyne interference in the prior art, and has remarkable technical advantages in the field of ultra-precision displacement and vibration measurement.
Description
technical field [0001] The invention belongs to the technical field of laser interferometry, and in particular relates to a displacement measurement method of a Michelson heterodyne interferometer based on double acousto-optic modulators. Background technique [0002] Laser heterodyne interferometry can overcome the DC drift caused by light intensity fluctuations, reduce laser power noise, and can perform stable interferometric measurements during the measurement process, and has high measurement resolution. Such characteristics make optical heterodyne interferometers become Instruments widely used in precision measurement. In fact, the laser heterodyne interferometer is an improvement made on the basis of the Michelson interferometer. It can realize heterodyne interference through dual-frequency lasers, or frequency-shifting devices such as acousto-optic modulators (AOM) and electro-optic modulation. . In many high-precision measurement systems, such as high-precision Dop...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B9/02
CPCG01B11/02G01B9/02028G01B9/0201G01B9/02007
Inventor 赵冬娥马亚云李沅王思育李诺伦
Owner ZHONGBEI UNIV