A kind of atmospheric pressure annealing method of multispectral ZnS material
A multi-spectral, normal-pressure technology, applied in the growth of polycrystalline materials, chemical instruments and methods, single crystal growth, etc., can solve problems such as high stress and failure to meet service requirements, reduce residual stress, and improve optical and mechanical properties , the effect of mild process conditions
Active Publication Date: 2021-08-10
山东有研国晶辉新材料有限公司 +1
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Problems solved by technology
At present, the internal stress of domestic m-ZnS window products is too large, and the stress value is above 40nm, which cannot meet the use requirements
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[0021] In order to make the technical route of the present invention clearer, the embodiments of the present invention will be further described in detail below in conjunction with the summary of the invention and the accompanying drawings.
[0022] The present invention provides a kind of atmospheric pressure annealing method of multi-spectral ZnS material, in one embodiment, comprises the following steps:
[0023] Step A: Furnace loading: eg figure 1 As shown, the multi-spectral ZnS window 1 after hot isostatic pressing is tiled on the support plate 3 whose size is larger than the size of the multi-spectral ZnS window 1 in the annealing furnace 2, and multi-spectral ZnS windows 1 of the same thickness are connected on the edge of the multi-spectral ZnS window 1. Spectrum ZnS connecting strip 4 covers graphite cover plate 5 of the same size on multispectral ZnS window 1; supports graphite support strips 6 thicker than multispectral ZnS window 1 and cover plate 5 on both sides...
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An atmospheric pressure annealing method for a multi-spectral ZnS material. The multi-spectral ZnS window is tiled on a supporting plate in an annealing furnace, a connecting strip of the same thickness is connected to the edge of the multi-spectral ZnS window, and a cover plate is covered on the multi-spectral ZnS window. Support graphite support strips on both sides of the support plate. After sealing the annealing furnace, use a vacuum pump to reduce the pressure in the annealing furnace, fill the protective atmosphere to normal pressure, and repeat the replacement for 3 times. Raise the temperature of the annealing furnace to 650‑750 ° C. The heating time is more than 10h, and the annealing is carried out by keeping the temperature for 50-150h; the temperature of the annealing furnace is lowered to 500°C, and the cooling time is longer than 20h; the temperature of the annealing furnace is lowered to room temperature, and the cooling time is longer than 40h. The invention can reduce the internal residual stress of the multi-spectral ZnS window material and improve the optical and mechanical properties of the material.
Description
technical field [0001] The invention belongs to the technical field of crystal material processing, in particular to an atmospheric pressure annealing method for multi-spectral ZnS materials. Background technique [0002] ZnS is a II-VI compound with high infrared transmittance and good mechanical, optical and thermal properties. It is widely used in mid- and far-infrared guided thermal imaging systems; The latter multi-spectral zinc sulfide (m-ZnS) has a wider transmission range (0.35-13um), which can meet the needs of composite guidance, and is the key material for the observation window and hood of infrared dual-band aircraft. The residual stress in the m-ZnS polycrystal will directly affect the optical imaging quality of the window; with the continuous improvement of military weapons and equipment, especially the improvement of the combat power of missile weapons, the comprehensive analysis of m-ZnS window materials and residual stress Performance puts forward higher re...
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IPC IPC(8): C30B33/02C30B29/48
CPCC30B29/48C30B33/02
Inventor 蒋立朋李冬旭杨海魏乃光朱晨阳杨建纯郭立田智瑞
Owner 山东有研国晶辉新材料有限公司