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A beam deflection precision aiming drive component micromirror

A technology for component micromirrors and beam deflection, applied in optical elements, optics, instruments, etc., can solve the problems of low control precision, low adjustment frequency, large size of the driver, etc. Effect

Active Publication Date: 2022-03-04
ZHONGBEI UNIV
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  • Application Information

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a beam deflection fine-pointing drive component micromirror to solve the problem of large volume, low adjustment frequency and slow response speed of the space laser communication ATP fine-tracking micromirror driver. Technical bottlenecks such as low displacement resolution and low control precision

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  • A beam deflection precision aiming drive component micromirror
  • A beam deflection precision aiming drive component micromirror
  • A beam deflection precision aiming drive component micromirror

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preparation example Construction

[0033] The invention discloses a method for preparing a micromirror of a beam deflection precision aiming drive component, which specifically comprises the following steps:

[0034] S1. Using the sol-gel method to heterogeneously integrate a silicon-based PLZT film 4 of 1.5-2 μm on the surface of the Pt / Ti layer of the polysilicon substrate;

[0035] see Figure 4, when the thickness of the PLZT film increases from 15 layers (1.5 μm) to 20 layers (2 μm), the phase transition hysteresis width of the PLZT film increases, and the saturation polarization increases to the maximum, which is due to the change of the microstructure of the PLZT film due to the thickness change. Due to the difference, when the number of layers is 30, the hysteresis width decreases and the polarization intensity decreases. When the thickness increases to 3 μm, the cracks are larger, the compactness is poor, and the electrical characteristics decrease.

[0036] S2. Using micro-electromechanical device pr...

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Abstract

The invention discloses a micromirror of a beam deflection precision aiming driving component integrating driving / light reflection functions, which includes a hollowed out peripheral base, four corners of the peripheral base are etched with Pt as the lower electrode, and the peripheral base There is a four-cantilever beam structure in the center, and a micromirror is directly above the center base of the four cantilever beams and the peripheral base. The metal layer Au is sputtered and deposited in the frame of the micromirror, and the upper electrode Au is arranged on the cantilever beam. The invention is reasonable in structure, simple in process, and integrates drive / light reflection functions, and effectively solves the problem of large micromirror volume, low adjustment frequency, slow response speed, and low displacement resolution of the fine-pointing actuator in the existing space optical communication ATP fine-tracking system. , Poor reliability and other technical bottlenecks, it is suitable for space optical communication beam deflection precision aiming and driving, and realizes precise control of beam rapid alignment.

Description

technical field [0001] The invention belongs to the technical field of fine tracking of space laser communication, and in particular relates to a micromirror of a beam deflection fine aiming driving component. Background technique [0002] In space laser communication FSO (Free Space Optical Communication), fast and accurate acquisition, tracking and targeting (ATP) is the premise to ensure long-distance space optical communication. It is the most critical core in the space optical communication system and is the most difficult to solve of a technology. The high-frequency fine tracking system is a subsystem of the ATP system, which compensates the errors of the rough tracking system to meet the final alignment and tracking accuracy requirements of the ATP system. The galvanometer is the fine-pointing actuator of the ATP fine-tracking system. Its main function is to realize the precise control of the rapid alignment of the beam. It requires a response in the order of microse...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/08
CPCG02B26/0833
Inventor 安坤孟江何建龙杨良兴刘玠王亚峰
Owner ZHONGBEI UNIV