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Laser microscope objective

A technology of microscopic objective lens and laser, which is applied in the field of optical lens, can solve the problems of unsatisfactory customers, large focal length of laser microscopic objective lens, etc., and achieve the effect of high image quality and large chromatic working area

Active Publication Date: 2020-04-17
FUJIAN INST OF RES ON THE STRUCTURE OF MATTER CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the present invention provides a laser microscope objective lens, which can solve the problem that the existing laser microscope objective lens cannot meet the needs of customers for larger area holographic products caused by the large focal length

Method used

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  • Laser microscope objective
  • Laser microscope objective
  • Laser microscope objective

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Embodiment 1

[0053] Such as figure 2 As shown, in this embodiment, the first positive lens group includes a positive lens O1, the second negative lens group includes a negative lens O2, and the third positive lens group includes a positive lens O3 and a positive lens O4. All lenses are made of radiation-resistant and laser-resistant quartz glass, model Corning7980KrF. Positive lens O1 is a convex lens with focal length f O1=8.90mm; negative lens O2 is concave lens, focal length f O2 =-12.02mm; Positive lens O3 is a convex lens with focal length f O3 =7.55mm; positive lens O4 is a convex lens with focal length f O4 = 6.00 mm. The total optical length TTHI of the whole microscopic objective lens is 8.59mm, and the optical back focal length of the whole microscopic objective lens is BFL=2.06mm.

[0054] In this embodiment, the air space between the positive lens O1 and the negative lens O2 is 0.33 mm; the air space between the negative lens O2 and the positive lens O3 is 0.10 mm; the ai...

Embodiment 2

[0063] In this embodiment, the first positive lens group includes a positive lens O1, the second negative lens group includes a negative lens O2, and the third positive lens group includes a positive lens O3 and a positive lens O4. All lenses are made of radiation-resistant and laser-resistant quartz glass, model Corning7980 ArF. Positive lens O1 is a convex lens with focal length f O1 =6.25mm; negative lens O2 is a concave lens, focal length f O2 =-10.1mm; the positive lens O3 is a convex lens with focal length f O3 =7.90mm; positive lens O4 is a convex lens with focal length f O4 = 5.86 mm. The total optical length of the entire microscopic objective lens TTHI=8.47mm, and the optical back focus BFL=2.00mm of the entire microscopic objective lens.

[0064] In this embodiment, the air space between the positive lens O1 and the negative lens O2 is 0.27 mm; the air space between the negative lens O2 and the positive lens O3 is 0.10 mm; the air space between the positive lens...

Embodiment 3

[0071] refer to figure 2 In this embodiment, the first positive lens group includes a positive lens O1, the second negative lens group includes a negative lens O2, and the third positive lens group includes a positive lens O3 and a positive lens O4. All lenses are made of radiation-resistant and laser-resistant quartz glass, model Corning8655 ArF. Positive lens O1 is a convex lens with focal length f O1 =11.97mm; negative lens O2 is concave lens, focal length f O2 =-14.09mm; Positive lens O3 is a convex lens with focal length f O3 =7.73mm; positive lens O4 is a convex lens with focal length f O4 =6.25mm. The total optical length TTHI of the whole microscopic objective lens is 8.77mm, and the optical back focal length of the whole microscopic objective lens is BFL=2.22mm.

[0072] In this embodiment, the air space between the positive lens O1 and the negative lens O2 is 0.35 mm; the air space between the negative lens O2 and the positive lens O3 is 0.10 mm; the air space ...

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Abstract

The invention discloses a laser microscope objective, belongs to the technical field of optical lenses, and can solve a problem that the requirements of customers on holographic products with larger areas cannot be met due to larger focal length of a laser microscope objective in the prior art. The laser microscope objective comprises a first positive lens group, a second negative lens group and athird positive lens group which are sequentially arranged in the laser incident direction, wherein the focal length f3 of the third positive lens group meets the condition that f3 is larger than or equal to 2.5 mm and smaller than or equal to 4.0 mm. The laser microscope objective is advantaged in that the three lens groups are arranged, and the focal length of the third lens group is within therange of 2.5-4.0 mm, so that the focal length of the laser microscope objective is reduced, and the requirements of customers on holographic products with larger areas can be met.

Description

technical field [0001] The invention relates to the technical field of optical lenses, in particular to a laser microscope objective lens. Background technique [0002] In the holographic lithography system, in order to obtain a large-area uniform coherent light field, it is necessary to perform pinhole filtering and spatial beam expansion on the laser. Such as figure 1 As shown, a laser microscope objective lens is used to focus the laser light first, then a pinhole is used for spatial filtering, and finally a collimating mirror is used to collimate the laser light to achieve spatial beam expansion. [0003] In order to increase the area of ​​the coherent light field in the holographic lithography system, it can be realized by increasing the focal length of the collimating lens or reducing the focal length of the microscopic objective lens. In actual work, the cost of a collimator with a large focal length is very high, and the replacement of the collimator requires readj...

Claims

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Application Information

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IPC IPC(8): G02B21/02G02B15/173
CPCG02B15/173G02B21/02G02B21/025
Inventor 张新彬李广伟陈怀熹冯新凯古克义梁万国黄玉宝
Owner FUJIAN INST OF RES ON THE STRUCTURE OF MATTER CHINESE ACAD OF SCI
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