Waste gas treatment system and waste gas treatment method

Abstract

The invention provides a waste gas treatment system and a waste gas treatment method. The system comprises a washing chamber, a combustion chamber and a recovery chamber which are communicated with one another. According to the system, when set gas is introduced into the combustion chamber, the first pneumatic valve on the first water inlet pipeline of the washing chamber is opened, the third pneumatic valve on a water return pipeline is closed, and washing water with a second set flow is introduced into the washing chamber through the first water inlet pipeline; and when the set gas is not introduced, the first pneumatic valve is closed, the third pneumatic valve is opened, and the recovered water in the recovery chamber flows into the washing chamber again through the first water returnpipeline so as to be recycled. According to the invention, different water using modes are adopted when set gas is introduced or not introduced, so that water can be saved under the condition that thewaste gas treatment effect is guaranteed, and the operation cost of equipment is reduced.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a waste gas treatment system and method. Background technique [0002] In the semiconductor process, the diffusion furnace tube equipment is a very common equipment, which is mainly used for diffusion, oxidation, annealing and alloying processes, and is also suitable for special temperature treatment of materials. Diffusion furnace tube equipment will produce exhaust gas during the working process. If these exhaust gases are discharged directly without treatment, they will cause great pollution to the air and the environment. Therefore, diffusion furnace tube equipment is usually connected to an exhaust gas treatment system. In order to effectively treat exhaust gas , the existing exhaust gas treatment system consumes a lot of water, and the operating cost of the equipment is very high. Contents of the invention [0003] The object of the present invention is to prov...

AI Technical Summary

Problems solved by technology

Diffusion furnace tube equipment will produce exhaust gas during the working process. If these exhaust gases are discharged directly without treatment, they will cause great pollution to the air and the environment. Therefore, diffusion furnace tube equipment is usually connected to an exhaust gas treatment system. In order to effectively treat exhaust gas , the water consumption of the existing waste gas treatment system is very large, and the operating cost of the equipment is very high

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