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Anti-adhesion radio frequency mechanical switch and preparation method thereof

A mechanical switch and anti-adhesion technology, applied in the direction of electric switches, electrostatic relays/electric adhesion relays, relays, etc., can solve problems such as contact adhesion and switch failure, achieve high reliability, avoid switch failure, and preparation methods simple effect

Active Publication Date: 2020-05-19
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The surface state of the contact, contact fatigue and high current can easily lead to the adhesion of the contact and make the switch fail

Method used

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  • Anti-adhesion radio frequency mechanical switch and preparation method thereof
  • Anti-adhesion radio frequency mechanical switch and preparation method thereof
  • Anti-adhesion radio frequency mechanical switch and preparation method thereof

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0026] In this embodiment, an anti-adhesion radio frequency mechanical switch is provided, such as figure 1 As shown, it includes a substrate 1, a coplanar waveguide structure, a cantilever beam structure and a driving structure.

[0027] The coplanar waveguide structure includes input signal lines 21 , output signal lines 22 and ground lines 23 disposed on the substrate 1 . There are two ground wires 23, the input signal wire 21 and the output signal wire 22 are located betw...

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Abstract

The invention provides an anti-adhesion radio frequency mechanical switch and a preparation method thereof. The anti-adhesion radio frequency mechanical switch comprises a substrate; a coplanar waveguide structure which is arranged on the substrate and is used for transmitting radio frequency and microwave signals; a cantilever beam structure which comprises a cantilever beam, an inductor array and a contact, wherein one end of the cantilever beam is connected with the coplanar waveguide structure through a support, and the other end of the cantilever beam is provided with the contact, and theinductor array is arranged on the cantilever beam; and a driving structure which comprises an inductor and a bonding pad, wherein the inductor is arranged on the substrate, and the inductor is connected with the bonding pad through a metal wire. Through the cantilever beam structure, the radio frequency mechanical switch is actively separated from the adhesion state, and the problem of switch failure caused by contact adhesion along with increase of power in the use process of the radio frequency mechanical switch is avoided.

Description

technical field [0001] The invention relates to the technical field of electronic devices, in particular to an anti-adhesion radio frequency mechanical switch and a preparation method thereof. Background technique [0002] There have been more than 20 years of research on radio frequency micromechanical switches in the world. From the switching mode, the radio frequency micromechanical switch can be roughly divided into two categories. (1) The general structure of the contact switch is: use static electricity or other driving methods to control the contact or disconnection of the signal line to achieve the effect of controlling the switch on and off. Its isolation depends on the parasitic capacitance of the disconnected part. The parasitic capacitance of the contact switch increases rapidly with the increase of the frequency, resulting in the rapid deterioration of the isolation of the switch; (2) The general structure of the capacitive switch is: the movement of the membra...

Claims

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Application Information

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IPC IPC(8): H01P1/10H01P11/00H01H59/00H01H11/00
CPCH01H11/00H01H59/00H01P1/10H01P11/00
Inventor 姜理利王雷李杰
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD