A self-sensing force and displacement piezoelectric valve and displacement control method
A technology of displacement control and self-sensing, applied in the direction of valve details, valve devices, valve operation/release devices, etc., can solve the problems of increasing valve volume and complexity, save cost and installation space, improve control accuracy and control speed effect
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[0052] The specific implementation manner of the present invention will be described in detail below in combination with the technical scheme and accompanying drawings.
[0053] In the first aspect, a piezoelectric valve with self-sensing force and displacement is provided. The piezoelectric valve 1 includes a moving end 2, a disc spring gasket 3 for preloading, an upper cover 4, internal and external threads 5, and a preloading screw 6. , a base 7, a regular octagonal spacer 8, and a piezoelectric stack actuator 9.
[0054] The piezoelectric stack actuator 9 is a driving element. Since the tensile strength of piezoelectric ceramics is very low, a pre-tightening force of about 750N needs to be applied during use.
[0055] The upper cover 4 and the base 7 are connected by internal and external threads 5 with a pitch of 1 mm, and the upper cover 4 is a cylindrical structure.
[0056] The piezoelectric stack actuator 9 is a driving element, which is arranged inside the upper cov...
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