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Probe card and WAT test machine

A testing machine and probe card technology, applied in the semiconductor field, can solve problems such as unsatisfactory cleanliness, and achieve the effect of improving the test cleanliness

Active Publication Date: 2020-06-09
SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing clean WAT test machine solution has a disadvantage: the airflow flows from one side of the fresh air source FFU to the other side, and the contamination / impurity particles carried by the wafer wafer may be introduced into the wafer Wafer, so the result may be counterproductive, and the cleanliness is not ideal

Method used

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  • Probe card and WAT test machine
  • Probe card and WAT test machine
  • Probe card and WAT test machine

Examples

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no. 1 example

[0045] Such as image 3 As shown, the present invention provides a kind of WAT testing machine platform first embodiment that utilizes described probe card, comprises: WAT automatic parameter tester and automatic probe station, the test head of WAT automatic parameter tester is arranged on automatic probe The top of the test machine cabinet, the test machine cabinet is provided with a carrier tray for carrying the tested wafer, and the wafer loading cabinet is adjacent to the test machine cabinet; wherein, the first wind source FFU1 is formed in the Test head Test head top;

[0046] The second air source FFU2 is formed on the top of the probe card loading cabinet Loader;

[0047] The third air source FAN1 is formed on the left side wall of the test machine cabinet Stage;

[0048] The fourth air source FAN2 is formed on the right side wall of the wafer loading cabinet Loader;

[0049] Wherein, a first air duct Air duct1 is provided in the center of the test head, and a secon...

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Abstract

The invention discloses a WAT test machine which comprises a WAT automatic parameter tester and an automatic probe station, wherein the test head of the WAT automatic parameter tester is arranged at the top of the test cabinet of the automatic probe station, a bearing disc for bearing a tested wafer is arranged in the test cabinet, and a wafer loading cabinet is adjacent to the test cabinet; a first air source which is formed at the top of the test head; a second air source which is formed at the top; a third air source which is formed on the left side wall of the test cabinet; and a fourth air source which is formed on the right side wall of the wafer loading cabinet, wherein the center of the test head is provided with a first air channel, the right side wall of the test cabinet and theleft side wall of the probe card loading cabinet are adjacent in a closed way and a second air channel is formed between the right side wall of the test cabinet and the left side wall of the probe card loading cabinet. The defects brought by the existing technical scheme of the WAT test machine are overcome, and the test cleanliness of the wafer is effectively improved.

Description

technical field [0001] The invention relates to the semiconductor field, in particular to a probe card used for a semiconductor WAT testing machine. The invention also relates to a WAT ​​testing machine using the probe card. Background technique [0002] At present, the solutions of mainstream clean WAT testing machines are as follows: figure 1 As shown, two fresh air source FFUs are installed on the WAT automatic parameter tester, and the two fresh air source FFUs are respectively installed on the side of the test machine cabinet Stage and the top of the tester Loader, so that the internal airflow of the machine can be circulated to remove pollution / impurity particle particle. Among them, the fresh air source FFU of the machine stage is installed on the side of the machine, and the air flow flows from one side of the fresh air source FFU to the other side, and then flows out from the exhaust fan on the side to take away the pollution / impurity particles inside the machin...

Claims

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Application Information

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IPC IPC(8): G01R1/073B08B13/00G01R31/26
CPCG01R1/073G01R31/2601B08B13/00
Inventor 徐晶肖尚刚周波
Owner SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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