A treatment method for prolonging the service life of polishing cloth

Abstract

The invention discloses a treatment method for prolonging the service life of a polishing cloth, which comprises the following steps: (1) brush plate and brush cloth: place the brush plate on the surface of the polishing machine plate on which the polishing cloth is pasted, and press it with the pressure head of the polishing machine Brush plate, the brush plate rotates in the same direction as the large plate of the polishing machine; (2) High-pressure water washing: wash the surface of the polishing cloth with high-pressure water, and rinse the entire polishing cloth with high-pressure water; (3) Dressing ring grinding: place the dressing ring On the polishing cloth, use the pressure head of the polishing machine to press the dressing ring. The dressing ring and the polishing machine pan rotate in the same direction. The dressing ring grinds the polishing cloth for 10s to 5 minutes; then make the dressing ring rotate in the opposite direction to the polishing machine pan. Keep the pressure range, rotation speed range and ultrapure water flow range unchanged, and continue to grind the polishing cloth for 10 seconds to 5 minutes. The method of the invention has a very significant prolonging effect on the service life of the polishing cloth, can effectively prolong the service life of the polishing cloth, and never affects the geometrical level of the silicon substrate polishing sheet.

Description

technical field [0001] The invention relates to a treatment method for prolonging the service life of a polishing cloth, which belongs to the technical field of semiconductor materials. Background technique [0002] The polishing cloth used for chemical mechanical polishing (CMP) is generally made of polyurethane material, which is processed into a non-woven structure and densely covered with tiny holes. Cooperate with polishing liquid containing alkaline colloidal silica particles to complete the process of alternating mechanical grinding and chemical corrosion. This process can easily cause the colloidal silica particles to coagulate, block the tiny pores on the surface of the polishing cloth, and make the polishing cloth lose the effect of mechanical grinding. [0003] The traditional method of improving the service life of polishing cloths is to remove the blockages in the pores on the surface of the polishing cloth by mechanical or chemical means, or to use a dressing ...

AI Technical Summary

Problems solved by technology

The former cleaning method cannot effectively remove the blockages in the pores on the surface of the polishing cloth, and the service life of the polishing cloth is always maintained at about tens of hours

The latter method is effective, but it will change the flatness of the surface of the polishing cloth, and then affect the geometry of the silicon substrate polishing sheet, making the product unable to meet customer requirements

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