Nested multistage optical focusing head, and universal joint type light source probe device and application thereof
An optical focusing and universal joint technology, applied in optics, measuring devices, optical components, etc., can solve the problems that the size and direction of the incident beam spot cannot be adjusted accurately, and the incident light beam cannot be irradiated accurately, so as to solve the problem of incident light spot Precise control of the size and direction of the effect of the problem
Pending Publication Date: 2020-06-23
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
However, the illumination-X-ray photoelectron spectroscopy synchronous analysis test device cannot precisely adjust the size and direction of the incident beam spot formed after the incident light excited by various external light sources is introduced into the vacuum chamber of the X-ray photoelectron spectrometer, so that each The incident light beam excited by a similar external light source cannot be accurately irradiated on the surface of the semiconductor sample that needs to be detected by simultaneous illumination-X-ray photoelectron spectroscopy
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[0027] like figure 1 As shown, a nested multi-stage optical focusing head and a universal joint type light source probe device include a lens focal length adjustment adapter tube 2 , a lens focal length adjustment reducing tube 3 and a focal length lens built-in tube 4 .
[0028] The top of the lens focal length adjustment adapter tube 2 is provided with a light source optical fiber inlet 1, and its bottom is connected with the lens focal length adjustment variable diameter tube 3, which is socketed with the focal length lens built-in tube 4; the focal length lens is built-in One side of the barrel 4 is provided with a lens focal length adjustment screw 5, and an optical focusing lens 6 is provided inside, and the bottom of the tube 4 is connected with an X-ray photoelectron spectrometer optical window adapter 8 through an axial 360-degree adjustment screw 7.
[0029] The external light source system 10 refers to one of a solar simulator, a xenon lamp, an LED light source, and...
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Abstract
The invention relates to a nested multistage optical focusing head, and a universal joint type light source probe device. The device comprises a lens focal length adjustment adapter cylinder, a lens focal length adjustment reducing cylinder and a focal length lens built-in cylinder. A light source optical fiber inlet is formed in the top of the lens focal length adjustment adapter cylinder, the bottom of the lens focal length adjustment adapter cylinder is connected with the lens focal length adjustment reducing cylinder, and the lens focal length adjustment reducing cylinder and the focal length lens built-in cylinder are sleeved together; a lens focal length adjusting screw is arranged on one side of the focal length lens built-in cylinder, an optical focusing lens is arranged in the focal length lens built-in cylinder, and the bottom of the focal length lens built-in cylinder is connected with an X-ray photoelectron spectrometer optical window adapter through an axial 360-degree adjusting screw. The light spot size and direction of incident light in the illumination-X-ray photoelectron spectroscopy synchronous analysis testing device can be effectively adjusted, so that light beams of the incident light accurately irradiate the surface of a sample needing synchronous illumination-X-ray photoelectron spectroscopy detection.
Description
technical field [0001] The invention relates to the field of synchronous analysis and testing of illumination-X-ray photoelectron energy spectrum, in particular to a nested multi-stage optical focusing head and a universal joint type light source probe device and applications thereof. Background technique [0002] X-ray photoelectron spectroscopy, or XPS for short, is an important surface analysis method developed based on the photoelectric effect. At present, it has become one of the most important means of material surface science research, and is widely used in academic fields such as chemical analysis, material development and application research, and physical theory discussion. [0003] Semiconductor materials play an extremely important role in solving the energy and environmental problems we are facing today. When illuminated, they will generate photogenerated electron-hole pairs and undergo directional separation and migration. The photogenerated electrons participa...
Claims
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IPC IPC(8): G01N23/2273G02B7/04
CPCG01N23/2273G02B7/04
Inventor 黄晓卷张亚军杨培菊沈志强胡霄雪牛建中毕迎普
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI