Laser cleaning method and laser cleaning system based on square resistance measurement

Abstract

The invention discloses a laser cleaning method and a laser cleaning system based on square resistance measurement. In the method, a laser cleaning machine and a four-probe probe are installed to align the sample to be cleaned, and the four-probe probe is connected to a resistance meter to adjust the laser cleaning machine Parameters, the substrate sample and the sample to be cleaned are placed on the three-dimensional platform, and the four-probe probe moves down to compress the sample surface, respectively measures the square resistance of the substrate sample and the sample to be cleaned, records the probe pressure and the surface temperature of the sample, and sets Order the number of scans for one cleaning, and perform n times of laser cleaning on the sample, where n is a natural number. After the cleaned sample is left to cool naturally, under the pressure of the probe and the temperature of the surface, the resistance meter measures the value after laser cleaning. Calculate the relative cleaning rate Φ for the square resistance of the sample. When the relative cleaning rate Φ is greater than or equal to the predetermined value, it is judged to be cleaned; when the relative cleaning rate Φ is less than the predetermined value, repeat cleaning until Φ is greater than or equal to the predetermined value, and the cleaning ends.

Description

technical field [0001] The invention belongs to the technical field of laser cleaning, in particular to a laser cleaning method and a laser cleaning system based on square resistance measurement. Background technique [0002] In recent years, as my country's environmental protection system has become more complete, people's awareness of environmental protection has become stronger and stronger, which has put forward higher environmental protection requirements for the industrial cleaning industry. Traditional industrial cleaning methods often have high pollution, high labor intensity, and low cleaning precision, which seriously hinder the development of modern cleaning technology. As a cleaning technology that has only emerged in recent years, laser cleaning is in sharp contrast to traditional cleaning methods such as chemical cleaning agents, ultrasonic waves, and mechanical methods because of its technical characteristics such as environmental protection, high efficiency, ...

AI Technical Summary

Problems solved by technology

[0004] The process of laser cleaning is very complicated, and the main cleaning mechanisms are thermal expansion, vaporization, ablation and phase explosion, etc.

For different light sources, substrates, pollutants and other factors will have a greater impact on the cleaning effect

At present, the laser cleaning equipment on the market can only roughly clean the workpiece, and only rely on the operator's experience and naked eyes to judge the cleaning effect and quality, which can easily lead to substrate damage

Existing technologies use changes in signals such as spectra, acoustic waves, and reflectivity during the laser cleaning process to monitor the cleaning effect, but these methods are often costly and complex

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