Method of manufacturing bonded body, temporary-fixing member, and stacked body
A temporary fixation and manufacturing method technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problems of increased conductive resistance, position deviation, fixed state deviation, etc., and achieve the effect of suppressing position deviation
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0491] In Example 1, after aligning the interposer, the anisotropic conductive member, and the TEG chip, between the interposer and the anisotropic conductive member, and between the anisotropic conductive member and the TEG chip, Isopropanol (boiling point 82°C) was arranged as a temporary fixing member, and after temporarily fixing it with isopropanol, removal and bonding of isopropanol were performed at the same time to produce a joined body. Furthermore, in Example 1, at the time of joining, the temporary fixing member was replaced with gas.
[0492] In Example 1, isopropanol was used as the temporary fixing member. After the temporary fixing was performed at a temperature of 50°C for 1 minute, the bonding was performed at a temperature of 270°C for 10 minutes. Therefore, the boiling point at the time of bonding was 82°C. The isopropanol is vaporized and removed.
Embodiment 2
[0494] In Example 2, compared with Example 1, the difference is that the removal process and joining process of the temporary fixing member are not performed at the same time, and the removal process of the temporary fixing member is a process of replacing the temporary fixing member with gas. Same as Example 1.
[0495] In Example 2, when the temporary fixing was performed, the temporary fixing was performed under the conditions of a temperature of 150°C for 1 minute, the isopropyl alcohol was vaporized and removed, and then the bonding was performed.
Embodiment 3
[0497] In Example 3, compared with Example 1, the difference is that the removal process and the joining process of the temporary fixing member are not performed at the same time, and the removal process of the temporary fixing member is a vaporization process, and it is the same as Example 1 except that.
[0498] In Example 3, when the temporary fixing was performed, the temporary fixing was performed under the conditions of a temperature of 100°C for 1 minute, the isopropyl alcohol was vaporized and removed, and then the filler was filled, and then the bonding was performed.
[0499] Regarding the filler, U8410-73CF3 (product number) manufactured by NAMICS CORPORATION was used, 10 g of filler was added to the dispenser, and a vacuum dispenser manufactured by Toray Engineering Co., Ltd. set at a pressure of 130 Pa and a temperature of 100°C ( Model: FS2500) has been dispensed.
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


