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Method of manufacturing bonded body, temporary-fixing member, and stacked body

A temporary fixation and manufacturing method technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problems of increased conductive resistance, position deviation, fixed state deviation, etc., and achieve the effect of suppressing position deviation

Pending Publication Date: 2020-09-01
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As mentioned above, the residue of the adhesive layer used for temporary fixing becomes the cause of the increase in the conductive resistance
[0010] In addition, when there is an adhesive layer during joining, the adhesive layer may flow depending on the joining conditions of the actual joining, and the position of the temporarily fixed state may deviate.

Method used

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  • Method of manufacturing bonded body, temporary-fixing member, and stacked body
  • Method of manufacturing bonded body, temporary-fixing member, and stacked body
  • Method of manufacturing bonded body, temporary-fixing member, and stacked body

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0491] In Example 1, after aligning the interposer, the anisotropic conductive member, and the TEG chip, between the interposer and the anisotropic conductive member, and between the anisotropic conductive member and the TEG chip, Isopropanol (boiling point 82°C) was arranged as a temporary fixing member, and after temporarily fixing it with isopropanol, removal and bonding of isopropanol were performed at the same time to produce a joined body. Furthermore, in Example 1, at the time of joining, the temporary fixing member was replaced with gas.

[0492] In Example 1, isopropanol was used as the temporary fixing member. After the temporary fixing was performed at a temperature of 50°C for 1 minute, the bonding was performed at a temperature of 270°C for 10 minutes. Therefore, the boiling point at the time of bonding was 82°C. The isopropanol is vaporized and removed.

Embodiment 2

[0494] In Example 2, compared with Example 1, the difference is that the removal process and joining process of the temporary fixing member are not performed at the same time, and the removal process of the temporary fixing member is a process of replacing the temporary fixing member with gas. Same as Example 1.

[0495] In Example 2, when the temporary fixing was performed, the temporary fixing was performed under the conditions of a temperature of 150°C for 1 minute, the isopropyl alcohol was vaporized and removed, and then the bonding was performed.

Embodiment 3

[0497] In Example 3, compared with Example 1, the difference is that the removal process and the joining process of the temporary fixing member are not performed at the same time, and the removal process of the temporary fixing member is a vaporization process, and it is the same as Example 1 except that.

[0498] In Example 3, when the temporary fixing was performed, the temporary fixing was performed under the conditions of a temperature of 100°C for 1 minute, the isopropyl alcohol was vaporized and removed, and then the filler was filled, and then the bonding was performed.

[0499] Regarding the filler, U8410-73CF3 (product number) manufactured by NAMICS CORPORATION was used, 10 g of filler was added to the dispenser, and a vacuum dispenser manufactured by Toray Engineering Co., Ltd. set at a pressure of 130 Pa and a temperature of 100°C ( Model: FS2500) has been dispensed.

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PUM

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Abstract

Provided are a method of manufacturing a bonded body in which positional error between electrically conductive members is suppressed and inhibition to bonding of the electrically conductive members issuppressed, a temporary-fixing member for use in the manufacture of the bonded body, and a stacked body. The method of manufacturing a bonded body comprises: a temporary-fixing step of providing a temporary-fixing member between at least two electrically conductive members having electrical conductivity to thereby temporarily fix the at least two electrically conductive members to each other; a removing step of removing the temporary-fixing member; and a bonding step of bonding the at least two electrically conductive members to each other. The temporary-fixing member is used for the method of manufacturing a bonded body. The stacked body comprises a stack in which a temporary-fixing member is provided between at least two electrically conductive members having electrical conductivity.

Description

Technical field [0001] The present invention relates to a method for manufacturing a bonded body in which at least two conductive members are joined as a connection object, a temporary fixing member for manufacturing the bonded body, and a laminate in which at least two conductive members are laminated, and in particular to a bonded body Manufacturing method, temporary fixing component and laminated body. Background technique [0002] A structure formed by filling a plurality of through holes provided on an insulating substrate with a conductive substance such as metal is one of the fields that have also attracted attention in nanotechnology in recent years. For example, it is expected to be an anisotropic conductive member. use. [0003] Anisotropic conductive components are inserted between electronic components such as semiconductor elements and the circuit board, and electrical connection between the electronic components and the circuit board can be obtained only by pressing,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/60H01R11/01
CPCH01R11/01H01L2224/80357H01L2224/80895H01L2224/80896H01L2224/80004H01L2224/80986H01L2224/06517H01L2224/09517
Inventor 斋江俊之山下广祐堀田吉则殿原浩二黑冈俊次
Owner FUJIFILM CORP