A Miniaturized Side Mount Differential Integrated Resonant Accelerometer

Abstract

A miniaturized side-mounted differential integrated resonant accelerometer, including a metal base and two double-ended fixed-supported quartz tuning forks, the metal base includes a mass block, a flexible hinge and a fixed metal base, and the mass block passes through the flexible hinge Connected with the fixed metal base, the flexible hinge is located in the middle of the mass block and the fixed metal base; the two double-ended fixed quartz tuning forks have the same structure, mounted on the side of the metal base and the fixed metal base, and arranged in a differential manner ; The present invention can reduce the impact of packaging stress and thermal stress on the quartz tuning fork, improve the processing accuracy of precision elastic parts and accelerometer accuracy, and has the advantages of high sensitivity and small size.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronics (MEMS) digital accelerometers, and in particular relates to a miniaturized side mounting differential type integrated resonant accelerometer. Background technique [0002] The resonant accelerometer with double-ended fixed-supported quartz tuning fork as the sensitive element has the advantages of high precision, easy excitation, high sensitivity, and digital output. Generally, two double-ended fixed-supported quartz tuning forks with the same structure are arranged in a differential manner, which can eliminate Effect of Thermal Stress on Accelerometer Output. This type of accelerometer can meet the application requirements of aerospace inertial navigation and guidance, weapons and equipment, intelligent manufacturing and other fields, and the future development prospects are very broad. [0003] This kind of resonant accelerometer can be divided into one-piece type and integr...

AI Technical Summary

Problems solved by technology

The integrated accelerometer design the spring-mass system and double-end fixed-supported quartz tuning fork as an integral structure, both of which are made of quartz, and are manufactured in an integrated manner using quartz micromachining technology. This structure has difficulties in processing, high cost, and partial sensitivity. low level problem

The integrated accelerometer manufactures the spring-mass system and the quartz tuning fork separately, and integrates them using a micro-assembly process. The spring-mass system generally uses a metal base, which has the advantages of high reliability, low cost, and high sensitivity, but it cannot be guaranteed by traditional machining processes. The processing accuracy of complex metal-based structures has problems such as processing residual stress and processing deformation of tiny precision structures; and integrated sensors are generally large in size, which is difficult to meet the miniaturization requirements of aerospace and other fields

Since the spring-mass system and the quartz tuning fork need to be integrated in a micro-assembly process, a part of the package stress will be transferred to the quartz tuning fork, resulting in problems such as a decrease in the basic accuracy of the accelerometer

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