Unlock instant, AI-driven research and patent intelligence for your innovation.

vacuum pump

A technology of vacuum pumps and turbomolecular pumps, which is applied to pumps, pump components, axial flow pumps, etc., and can solve the problems of electric motors not performing well, narrowing of flow paths, and degraded exhaust performance.

Active Publication Date: 2022-07-26
EDWARDS JAPAN
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the reaction product accumulates inside the vacuum pump, the flow path of the reaction product may be narrowed and the compression performance and exhaust performance of the vacuum pump may decrease.
On the other hand, if the temperature of the gas transfer part using aluminum, stainless steel, etc. is too high for the rotor blades and fixed blades, the strength of the rotor blades and fixed blades may decrease and breakage may occur during operation.
In addition, the electric motor that rotates the electrical equipment installed in the vacuum pump and the rotor may not exhibit the desired performance when the temperature becomes high.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • vacuum pump
  • vacuum pump
  • vacuum pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0045] figure 1 is a vertical cross-sectional view of the vacuum pump 10 shown as an embodiment of the present invention, figure 2 Yes figure 1 An enlarged partial cross-sectional view of the vacuum pump 10 shown. figure 1 and figure 2 Among them, the vacuum pump 10 is a composite pump composed of a turbomolecular pump mechanism PA and a screw groove pump mechanism PB, which are housed in a substantially cylindrical casing 11 as an exhaust function portion 12 .

[0046] The vacuum pump 10 includes a casing 11 , a rotor 15 having a rotor shaft 14 rotatably supported in the casing 11 , an electric motor 16 that rotates the rotor shaft 14 , and a stator column 18B that accommodates a part of the rotor shaft 14 and the electric motor 16 . The base 18 and so on.

[0047] The case 11 is formed in a bottomed cylindrical shape. The casing 11 functions as a stator of the turbomolecular pump mechanism PA, and has a tubular portion 11A and a water cooling spacer 11B. In addition,...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Provided is a vacuum pump capable of suppressing solidification of gas while operating the pump normally. A turbomolecular pump mechanism (PA) and a screw groove pump mechanism are provided in the casing (11) having an intake port (11b) for sucking gas from the outside and an exhaust port (11a) for discharging the sucked gas to the outside. (PB), a first temperature adjustment mechanism (39), and a second temperature adjustment mechanism (40), wherein the turbomolecular pump mechanism (PA) has rotary blades (23) and fixed blades ( 31), the screw groove pump mechanism (PB) is provided continuously with the exhaust port (18a) side of the turbomolecular pump mechanism (PA), and the first temperature adjustment mechanism (39) adjusts the temperature of the turbomolecular pump mechanism (PA). In the cooling adjustment, the second temperature adjustment mechanism (40) adjusts the heating of the turbomolecular pump mechanism (PA).

Description

technical field [0001] The present invention relates to vacuum pumps, and in particular, to vacuum pumps used in semiconductor manufacturing apparatuses, analytical apparatuses, and the like. Background technique [0002] In the manufacture of semiconductor devices such as memories and integrated circuits, the processes of film formation and etching of insulating films, metal films, and semiconductor films, etc. are performed in a processing chamber in a high vacuum state to avoid the influence of dust in the air. . In addition, a vacuum pump such as a combination pump combining a turbomolecular pump and a screw groove pump is used to make the inside of the processing chamber a predetermined high vacuum degree during processing in order to discharge the gas introduced into the processing chamber. [0003] A vacuum pump combining a turbomolecular pump and a screw groove pump has a suction port for sucking the reaction product (gas) generated in the processing chamber, and an...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04
CPCF04D19/042F04D19/044F04D29/584F04D29/5853F04D19/046F04D27/0276F04D19/048F04D29/056F04D27/00F04D29/053F04D29/048F05B2240/51F05B2260/231F05B2280/1021F05B2280/5004
Inventor 三轮田透高井庆行坂口祐幸
Owner EDWARDS JAPAN