A low temperature drift relative plane mount differential integrated resonant accelerometer

Abstract

A low temperature drift relative plane mount differential type integrated resonant accelerometer, comprising a metal base, a first double-ended fixed quartz tuning fork, a second double-ended fixed quartz tuning fork, the metal base comprises a metal base, a first flexible The hinge, the second flexible hinge, the mass block and the metal outer frame, the mass block is connected with the metal base through the first flexible hinge and the second flexible hinge, and the left and right sides and the front side of the metal base are connected with the metal outer frame ; The first double-ended fixed quartz tuning fork and the second double-ended fixed quartz tuning fork have the same structure and are mounted on the front and back of the metal base and are arranged in a differential manner; the first flexible hinge and the second flexible hinge are in The sensitive direction SA has elastic properties; the present invention can reduce the influence of packaging stress and thermal stress on the output of the accelerometer, and has the advantages of high sensitivity, small temperature drift, high precision, and small size.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical electronics (MEMS) digital accelerometers, and in particular relates to a low-temperature drift relative plane mount differential type integrated resonant accelerometer. Background technique [0002] Micro-resonant accelerometers do not require analog-to-digital conversion modules, and convert acceleration into frequency output. They have the advantages of good reliability, high precision, and fast response. They have been widely used in aerospace, inertial navigation, intelligent equipment manufacturing and other fields. The micro-resonant accelerometer is generally composed of a spring-mass system and a micro-resonator. The acceleration acts on the micro-resonator through the spring-mass system, causing the natural frequency of the micro-resonator to change. The frequency change value is measured by the peripheral test system. Calculate the value of acceleration and realize digital outp...

AI Technical Summary

Problems solved by technology

However, since the two quartz tuning forks cannot guarantee complete consistency in the process, the differential arrangement cannot completely eliminate the error caused by the thermal stress on the accelerometer

[0004] The integrated micro-resonant accelerometer manufactures the spring-mass system and the micro-resonator separately, and integrates them using the micro-assembly process, which has the advantages of simple processing and strong anti-interference ability. The design will greatly increase the difficulty of implementing micro-assembly processes such as bonding gold wires and bonding; and packaging stress will be generated during the micro-assembly and packaging process, which will greatly reduce the basic accuracy of the accelerometer

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