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Breaking device

A technology of breaking and breaking rods, applied in the control field of its action, can solve the problems of excessive pressing, deterioration of fracture quality, etc., and achieve the effect of avoiding excessive pressing

Pending Publication Date: 2021-01-08
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, setting the push-in conditions in the form described will instead lead to excessive push-in
Debris (shards) will be generated in the object to be broken due to excessive pressing of the breaking rod
The generation of debris will inevitably deteriorate the fracture quality

Method used

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Effect test

Embodiment Construction

[0020]

[0021] figure 1 It is a figure which shows the schematic structure of the breaking apparatus 100 of this embodiment. In addition, in figure 1 The xyz coordinates of the right-hand system are marked in , that is, the horizontal plane is set as the xy plane, and the vertical direction is set as the positive direction of the z-axis.

[0022] The breaking device 100 is a device for breaking an object to be broken (hereinafter also referred to as a workpiece) W along a predetermined breaking position. On one main surface side of the workpiece W, a scribe line SL is provided in advance along a planned breaking position.

[0023] The breaking device 100 mainly comprises a breaking bar 1 and a supporting part 2. The breaking bar 1 can be lifted and lowered freely in the vertical direction (z-axis direction), and the lower end is provided with a knife tip 1e, and the length of the knife tip 1e perpendicular to the length The cross-section in the direction is triangular, a...

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PUM

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Abstract

Provided is a breaking device with which even in a case of repeatedly performing breaking, breaking can be desirably performed whenever the breaking is performed. The present invention has: a motor that rotates inside a horizontal surface; a movement conversion mechanism that converts a rotary movement of the motor into an ascending / descending movement of a breaking bar; a motor control unit thatcontrols the operation of the motor; a torque detection unit that detects the torque acting on the motor; and a breaking processing unit for performing breaking on a breaking target object by controlling the operations of respective parts of the breaking device. In a state in which the breaking target object is placed and fixed to a support part while one main surface thereof is brought into contact with the support part, the breaking bar is lowered toward the other side main surface of the breaking target object, that is, a position corresponding to a scribing line formation position by rotating the motor by means of the motor control unit. It is determined that the breaking of the breaking target object is completed on the basis of a change in the torque detected by the torque detectionunit when the breaking bar is being lowered.

Description

technical field [0001] The invention relates to a device for breaking an object along a scribe line, in particular to the control of its action. Background technique [0002] As a method for breaking a plate-shaped breaking object such as a brittle material substrate such as a glass substrate, a semiconductor substrate, and a ceramic substrate, the following method is known: firstly, a scribing step is performed, and then a breaking step is performed. The scribing step is A scribe line is formed on one main surface of the object to be divided, and vertical cracks are extended from the scribe line. In the breaking step, the cracks are further expanded in the thickness direction by applying an external force, thereby separating the cracks. The object to be divided is broken (for example, refer to Patent Document 1). [0003] The breaking process is generally carried out by means of a breaking device provided with a breaking bar which can be freely raised and lowered in the ve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/00B26F3/00C03B33/033H01L21/301
CPCC03B33/033B28D5/0011B28D5/0023B28D5/0064C03B33/037B26F3/002Y02P40/57
Inventor 三谷卓朗
Owner MITSUBOSHI DIAMOND IND CO LTD