Bar-type substrate transportation device and method

Abstract

The invention provides a bar-type substrate transportation device and method. The bar-type substrate transportation device mainly comprises a main body, a plurality of fixed rollers and a plurality ofmovable rollers, wherein the main body is of a concave structure, a first support wall and a second support wall which correspond to each other are arranged on the two sides of the concave structureseparately, a rail is embedded in each support wall correspondingly, a driver is arranged at the bottom of the concave structure, each rail is composed of two parallel rails and a plurality of vertical rails, the plurality of fixed rollers which are parallel to one another to form a supporting frame face are arranged between the first support wall and the second support wall, and the plurality ofmovable rollers are arranged in the corresponding rails in parallel, are crossed with the plurality of fixed rollers, and can move in the rails at the same time.

Description

technical field [0001] The invention relates to a bar-type substrate transport device and its method, especially a transport device that can move up and down and laterally, so that a large amount of displacement time can be reduced when transferring substrates, and at the same time, the cycle of the transport device can be reduced. time to move. Background technique [0002] Generally speaking, a common substrate transportation device usually uses a conveyor line to transfer the substrate to a conveying structure composed of many conveying rollers, and then moves the substrate to a designated position by a robotic arm installed near the conveying structure, or a robotic arm After cutting the substrate, the substrate is transported to another group of transport structures. Although the robot arm can move the substrate horizontally or up and down, it needs to move step by step due to the need of the robot arm, and the size of the moving substrate is also different. Limitation...

AI Technical Summary

Problems solved by technology

[0002] Generally speaking, a common substrate transportation device usually uses a conveyor line to transfer the substrate to a conveying structure composed of many conveying rollers, and then moves the substrate to a designated position by a robotic arm installed near the conveying structure, or a robotic arm After cutting the substrate, the substrate is transported to another group of transport structures. Although the robot arm can move the substrate horizontally or up and down, it needs to move step by step due to the need of the robot arm, and the size of the moving substrate is also different. Limitation, which limits the size of the substrate during transfer, and takes too much unnecessary time when the robot arm moves, which in turn affects the efficiency of substrate transfer

[0003] Therefore, how to provide a method that can shorten the transportation time, and at the same time solve the problem that the substrate cannot be effectively transported to the location in a short period of time during the handling process, and at the same time, the substrate can be transported to the location without size limitation is still a technology that needs to be overcome and solved. subject

Images