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Alloy soft magnetic particle with high magnetic conductivity and low magnetic loss in microwave frequency band and preparation method of alloy soft magnetic particle

A technology with high magnetic permeability and microwave frequency band, which is applied in the direction of inductance/transformer/magnet manufacturing, inorganic material magnetism, metal material coating technology, etc., can solve the problem of reducing the application frequency band of soft magnetic composites, increasing high-frequency magnetization energy loss, Increase particle domain wall displacement damping and other issues to achieve high magnetic permeability, increased operating frequency, and low internal stress

Active Publication Date: 2021-01-22
LANZHOU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitations of the preparation technology, on the one hand, the magnetic particles obtained by this preparation method have great differences in the ratio of diameter to thickness, it is difficult to reduce the thickness of all particles below the skin depth, and the eddy current in some magnetic particles is still very serious; on the other hand, the mechanical ball milling method will generate some defects such as voids, impurities, and internal stresses in the particles, which will increase the domain wall displacement damping of the particles during magnetization
The limitations of these two aspects are manifested in the magnetic spectrum, that is, the magnetic dispersion phenomenon of the magnetic permeability in the frequency band lower than the theory, and the imaginary part of the magnetic permeability is large; in practical applications, it is to reduce the application frequency band of the soft magnetic compound. Increased energy loss during high frequency magnetization

Method used

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  • Alloy soft magnetic particle with high magnetic conductivity and low magnetic loss in microwave frequency band and preparation method of alloy soft magnetic particle
  • Alloy soft magnetic particle with high magnetic conductivity and low magnetic loss in microwave frequency band and preparation method of alloy soft magnetic particle
  • Alloy soft magnetic particle with high magnetic conductivity and low magnetic loss in microwave frequency band and preparation method of alloy soft magnetic particle

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Experimental program
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Effect test

Embodiment 1

[0027] A clean Si sheet is selected as the base layer, and a layer of metal Al with a thickness of 100 nm is deposited on the Si sheet as a transition layer by means of magnetron sputtering. Continue sputtering to deposit a layer of FeCoB alloy with a thickness of 200nm on the Al layer; then coat a layer of reflective photoresist on the FeCoB, and cover a layer of mask on the photoresist by laser direct writing (periodical pattern with a diameter of 20um Arranged circular holes); expose the photoresist covered by the mask, so that the part of the photoresist that receives the light is exposed and deteriorated; then use the etching method to develop a pattern opposite to the mask on the photoresist; Use ion beam etching to etch away the part of FeCoB that is not covered by the photoresist; after the etching process is completed, place the whole material in acetone to dissolve the developed pattern formed by the photoresist, and then transfer it to NaOH The Al layer is etched aw...

Embodiment 2

[0029] A clean Si sheet is selected as the base layer, and a layer of metal Al with a thickness of 100 nm is deposited on the Si sheet as a transition layer by means of magnetron sputtering. Coat a layer of positive photoresist with a thickness of 500nm on the Al layer, and cover a layer of mask plate (periodically arranged circular holes with a diameter of 20um) on the photoresist by laser direct writing; The resist is exposed, so that the part of the photoresist that receives the light is exposed and deteriorated; then the photoresist is developed on the photoresist with the same pattern as the mask plate by the etching method; the developed pattern is grown by solution electroplating FeCo alloy; after the developed pattern is completely filled with FeCo alloy, place the whole material in acetone to dissolve the developed pattern formed by photoresist, and then transfer to NaOH solution to corrode the Al layer. At this time, the diameter is 20um , The FeCo alloy with a thick...

Embodiment 3

[0031] A clean Si sheet is selected as the base layer, and a layer of metal Al with a thickness of 100 nm is deposited on the Si sheet as a transition layer by means of magnetron sputtering. Coat a layer of positive photoresist with a thickness of 500nm on the Al layer, and cover a layer of mask plate (periodically arranged circular holes with a diameter of 20um) on the photoresist by laser direct writing; The resist is exposed, so that the part of the photoresist that receives the light is exposed and deteriorated; then the photoresist is developed on the photoresist with the same pattern as the mask plate by the etching method; the developed part is continued by magnetron sputtering FeNi alloy is sputtered in the pattern; after the developed pattern is completely filled with FeNi alloy, the whole material is placed in acetone to dissolve the developed pattern formed by the photoresist, and then transferred to NaOH solution to corrode the Al layer. , the FeNi alloy with a dia...

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Abstract

The invention relates to a preparation method of alloy soft magnetic particles with high magnetic conductivity and low magnetic loss in a microwave frequency band, and the method comprises the following steps: preparing patterned flaky alloy soft magnetic particles on a Si sheet coated with a soluble buffer layer by magnetron sputtering, and stripping an alloy soft magnetic material from the buffer layer by a dissolving method to obtain the alloy soft magnetic particles with high magnetic conductivity and low magnetic loss in the microwave frequency band; and obtaining the alloy soft magneticparticles with fixed diameter and thickness. Compared with a conventional mechanical ball milling method, the flaky alloy soft magnetic particles obtained through the method have the advantages of being low in defect, low in internal stress, low in loss angle tangent and the like, the diameter and thickness of the alloy soft magnetic particles can be accurately controlled, and eddy-current loss ofall the magnetic particles is restrained.

Description

technical field [0001] The invention relates to the technical field of soft magnetic materials, in particular to the application of high-frequency energy transmission and conversion of soft magnetic materials. Background technique [0002] The main function of soft magnetic materials is to convert energy between electricity and magnetism, and is an essential component of power electronic devices such as transformers, switching power supplies, and inductors. With the rapid development of the semiconductor industry, the emergence of wide bandgap semiconductors such as SiC and GaN has allowed the theoretical frequency of power regulation to exceed 100MHz. However, there is currently no soft magnetic material that can be effectively used in this frequency band. At present, the soft magnetic materials used in power electronic devices are mainly soft ferrites (MnZn and NiZn ferrite), and the effective working frequency band is within the KHz range, which is far below the same leve...

Claims

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Application Information

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IPC IPC(8): H01F41/02H01F1/12C23C14/35C23C14/14C23C14/58C25D3/56C25D5/48
CPCH01F1/12H01F41/02C23C14/35C23C14/0005C23C14/14C23C14/5873C25D3/562C25D5/48
Inventor 王涛王国武王辉
Owner LANZHOU UNIVERSITY