A combined device for laser preprocessing of large-aperture optical components and imaging detection of absorption defects
A technology of laser pretreatment and optical components, applied in the direction of optical testing flaws/defects, laser welding equipment, manufacturing tools, etc., to achieve the effect of reducing construction and operation costs and improving processing and detection efficiency
Active Publication Date: 2022-04-08
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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The absorption defects of optical components are one of the main causes of the above problems.
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[0014] Combine below Figure 1-2 Specifically describe a combined device for laser preprocessing of large-aperture optical elements and imaging detection of absorption defects proposed by the present invention. However, it should be understood that the accompanying drawings are only provided for better understanding of the present invention, and should not be construed as limiting the present invention. The specific composition of the device is as follows: high energy repetition rate pulsed laser 1, energy adjustment device 2, optical switch 3, beam shaping and collimation beam expansion system 4, focusing lens 5, wedge beam splitter 6, beam diagnostic unit 7, pulse energy monitoring Unit 8, large aperture optical element 9, two-dimensional scanning sample stage 10, low energy repetition rate pulse detection laser 11, detection beam collimation beam expansion system 12, imaging optical system 13, narrow-band filter 14, imaging CCD15 and control computer 16.
[0015] The lase...
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The invention discloses a combined device for laser pretreatment and absorption-type defect imaging detection of large-diameter optical elements, which utilizes high-energy repetition rate pulsed lasers to form large-size spots through energy adjustment and collimation and beam expansion to irradiate optical elements with laser pretreatment At the same time, the absorption defect of the optical element forms a transient temperature distribution and a refractive index distribution in the sample due to the absorption of the energy of the irradiated laser beam. After a certain delay, another beam of low-energy pulsed laser is collimated and expanded to form a large-scale detection spot to irradiate the same area where the optical element is irradiated by the pretreatment laser, and the transmission or reflection diffraction light field distribution after a certain transmission distance is given by CCD records. By analyzing and processing the characteristics of the diffraction light field image recorded by the CCD, it is determined whether there are absorption defects in the irradiated area of the optical element and the corresponding characteristics, and the full-aperture laser pretreatment of large-aperture optical elements and high-resolution imaging detection of absorption defects are realized through scanning.
Description
technical field [0001] The invention relates to the field of laser pretreatment and detection of optical elements, in particular to a combined device for laser pretreatment of large-diameter optical elements and high-resolution imaging detection of absorption defect distribution. Background technique [0002] In high-energy laser systems such as laser ignition devices, a large number of large-aperture optical components are used, and the laser damage threshold of these optical components directly determines the carrying capacity and long-term stable operation capability of the entire high-energy laser system. In order to improve the laser damage threshold of these large-aperture optical components, laser pretreatment technology is usually used to treat the optical components. By using a laser beam with an energy density lower than the laser damage threshold to irradiate the optical element to remove damage defects or surface contamination, the laser damage threshold of the o...
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IPC IPC(8): B23K26/06B23K26/064G01N21/88
CPCB23K26/06B23K26/064G01N21/88
Inventor 李斌成孙启明
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA