Micro electric field sensor based on multi-structure coupling and its preparation method

Abstract

A miniature electric field sensor based on multi-structure coupling, comprising: the miniature electric field sensor includes a first resonator, a second resonator, a third resonator, an electrode unit and a fixing unit; wherein: the first resonator and the second resonator The two resonators, the third resonator and the second resonator are connected by capacitive coupling or mechanical beam coupling, the first resonator and the third resonator are respectively placed on both sides of the second resonator, and the first resonator The resonator and the third resonator are connected to the reference zero potential or a certain reference potential; the electrode unit includes excitation electrodes, tuning electrodes, vibration The detecting electrode and the electric field sensing electrode are used to measure the electric field strength at the position of the miniature electric field sensor through the change of the field strength between the electrode plates. The electric field sensor has the advantages of high sensitivity, simple structure, adjustable dynamic range and sensitivity, and the like.

Description

technical field [0001] The invention relates to the field of sensors in the electronic industry, in particular to a multi-structure coupling-based miniature electric field sensor and a preparation method thereof. Background technique [0002] Electric field sensors are widely used in many fields such as aerospace, meteorological detection, power system, industrial production, environmental monitoring, etc., and play an important role in safety assurance and scientific research. For different application fields, the properties of the electric field to be measured (such as the frequency, intensity, direction and duration of the electric field to be measured, etc.) and the working environment of the sensor (such as the temperature and state of the sensor's environment, etc.) are different. Therefore, the types of electric field sensors required for measurement are also different. At present, many electric field measurement principles and sensor processing technologies have bee...

AI Technical Summary

Problems solved by technology

However, due to the small size of the device, the micro-electric field sensor has problems such as relatively weak signals, and the resolution is low. At present, the electrostatic field resolution of the micro-electric field sensor is generally lower than 10V / m, which is difficult to meet the needs of these special fields.

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